TOP > 外国特許検索 > METHOD OF FORMING METAL LAMINATE THIN FILM OR OXIDE THIN FILM USING SUPERCRITICAL FLUID OR SUBCRITICAL FLUID, AND FILM FORMING APPARATUS THEREFOR

METHOD OF FORMING METAL LAMINATE THIN FILM OR OXIDE THIN FILM USING SUPERCRITICAL FLUID OR SUBCRITICAL FLUID, AND FILM FORMING APPARATUS THEREFOR 新技術説明会

外国特許コード F060001527
整理番号 F060001527
掲載日 2007年4月2日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2005JP010040
国際公開番号 WO 2005/118910
国際出願日 平成17年6月1日(2005.6.1)
国際公開日 平成17年12月15日(2005.12.15)
優先権データ
  • 特願2004-167782 (2004.6.4) JP
発明の名称 (英語) METHOD OF FORMING METAL LAMINATE THIN FILM OR OXIDE THIN FILM USING SUPERCRITICAL FLUID OR SUBCRITICAL FLUID, AND FILM FORMING APPARATUS THEREFOR 新技術説明会
発明の概要(英語) A method and apparatus by which regardless of any exhibition of conductivity of foundation layer, there can be realized not only formation of a metal oxide thin film but also easy formation of a laminate structure of conductive metal thin film. There is provided a method comprising dissolving a metal precursor of metal oxide whose formation is intended and an oxidizer capable of oxidizing the metal precursor in a supercritical fluid or subcritical fluid, forming through oxidation reaction a thin film of metal oxide on a surface of substrate disposed in the supercritical fluid or subcritical fluid, and subsequently dissolving a reducing agent and a conductive metal precursor in the supercritical fluid or subcritical fluid, so that not only is the thin film of metal oxide on substrate surface reduced into a metal thin film but also the conductive precursor is reduced on the metal thin film after reduction to thereby effect laminating with a thin film of conductive metal.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • Yamanashi University
  • 発明者(英語)
  • Kondo, Eiichi
国際特許分類(IPC)
指定国 AE AG AL AM AT AU AZ BA BB BE BF BG BJ BR BW BY BZ CA CF CG CH CI CM CN CO CR CU CY CZ DE DK DM DZ EC EE EG ES FI FR GA GB GD GE GH GM GN GQ GR GW HR HU ID IE IL IN IS IT JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MC MD MG MK ML MN MR MW MX MZ NA NE NG NI NL NO NZ OM PG PH PL PT RO RU SC SD SE SG SI SK SL SM SN SY SZ TD TG TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW
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