TOP > 外国特許検索 > SPHERICAL ABERRATION CORRECTION MODERATING TYPE LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROSCOPY DEVICE, AND OPTICAL ELECTRON MICROSCOPE

SPHERICAL ABERRATION CORRECTION MODERATING TYPE LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROSCOPY DEVICE, AND OPTICAL ELECTRON MICROSCOPE

外国特許コード F080001979
整理番号 F080001979
掲載日 2008年11月27日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2007JP064679
国際公開番号 WO 2008/013232
国際出願日 平成19年7月26日(2007.7.26)
国際公開日 平成20年1月31日(2008.1.31)
優先権データ
  • 特願2006-203318 (2006.7.26) JP
発明の名称 (英語) SPHERICAL ABERRATION CORRECTION MODERATING TYPE LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROSCOPY DEVICE, AND OPTICAL ELECTRON MICROSCOPE
発明の概要(英語) Provided is a spherical aberration correction moderating type lens corrects the spherical aberration, which occurs in an electron or ion beam (as will be called the beam) emitted at a constant divergence angle from a predetermined object plane position. The lens has a rotor plane centered on an optical axis, and is equipped with at least two electrodes, to which an arbitrary voltage is to be applied from an external power source. At least one of the electrodes is a mesh (M) having such a concave shape with respect to an object plane (P0) as is shaped into a mesh (M) made of a rotor plane centered on the optical axis. The individual electrodes are caused, by the voltages applied thereto, to moderate the beam and to generate a moderating type convergent electric field for correcting the spherical aberration to occur in that beam. As a result, the spherical aberration correction moderating type lens converges such a beam on an image plane as is emitted from a specimen and as has a high energy and a large divergence angle.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • National University Corporation Nara Institute Of Science And Technology
  • 発明者(英語)
  • Matsuda, Hiroyuki
  • Daimon, Hiroshi
国際特許分類(IPC)
指定国 AE AG AL AM AT AU AZ BA BB BE BF BG BH BJ BR BW BY BZ CA CF CG CH CI CM CN CO CR CU CY CZ DE DK DM DO DZ EC EE EG ES FI FR GA GB GD GE GH GM GN GQ GR GT GW HN HR HU ID IE IL IN IS IT JP KE KG KM KN KP KR KZ LA LC LK LR LS LT LU LV LY MA MC MD ME MG MK ML MN MR MT MW MX MY MZ NA NE NG NI NL NO NZ OM PG PH PL PT RO RS RU SC SD SE SG SI SK SL SM SN SV SY SZ TD TG TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
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