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METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE

外国特許コード F100002220
整理番号 F100002220
掲載日 2010年7月16日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2009JP006658
国際公開番号 WO 2010/067570
国際出願日 平成21年12月7日(2009.12.7)
国際公開日 平成22年6月17日(2010.6.17)
優先権データ
  • 特願2008-314113 (2008.12.10) JP
発明の名称 (英語) METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE
発明の概要(英語) For a scanning type probe microscope for which a cantilever holding member moves finely up/down, with the conventional optical lever method, it is not possible to extract the amount of deflection (θ) and the amount of fine up/down movement (z) of a cantilever from the measurement output. Incident light (19) radiating from a laser light source (18) is reflected by the upper face of a cantilever (13) and reflected light (19a) enters a light detection means (20). The incident light (19) and the reflected light (19a) are in a plane which does not include the long axis of the cantilever (13). Because the incident light (19) and the reflected light (19a) are in a plane which does not include the long axis of the cantilever (13), displacement of the reflected light (19a) due to the change in the amount of deflection (θ) and the change in the amount of fine up/down movement (z) of the cantilever (13) are in different directions above the light detection means (20). Thus, the change in the amount of deflection (θ) and the change in the amount of fine up/down movement (z) of the cantilever (13) can be extracted from the output of the light detection means (20).
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • Kyoto University
  • 発明者(英語)
  • Tsunemi, Eika
  • Satoh, Nobuo
  • Kobayashi, Kei
  • Yamada, Hirofumi
  • Matsushige, Kazumi
国際特許分類(IPC)
指定国 AE AG AL AM AO AT AU AZ BA BB BE BF BG BH BJ BR BW BY BZ CA CF CG CH CI CL CM CN CO CR CU CY CZ DE DK DM DO DZ EC EE EG ES FI FR GA GB GD GE GH GM GN GQ GR GT GW HN HR HU ID IE IL IN IS IT JP KE KG KM KN KP KR KZ LA LC LK LR LS LT LU LV LY MA MC MD ME MG MK ML MN MR MT MW MX MY MZ NA NE NG NI NL NO NZ OM PE PG PH PL PT RO RS RU SC SD SE SG SI SK SL SM SN ST SV SY SZ TD TG TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
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