CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM
The present invention provides a novel carbon-based material in which carbons different in property are combined in such a manner as to be applicable to a device. The carbon-based thin film provides a carbon-based thin film 10 including first phases 1 that contain amorphous carbon and extend in a film thickness direction, and a second phase 2 that contains a graphite structure and intervenes between the first phases 1. In the thin film, at least one selected from the group consisting of the following a) to e) is satisfied: a) the second phase contains more graphite structures per unit volume than the first phases
b) a density of the second phase is larger than that of the first phases
c) an electric resistivity of the second phase is lower than that of the first phases
d) an elastic modulus of the second phase is higher than that of the first phases
and e) in the second phase, a basal plane of the graphite structure is oriented along the film thickness direction.