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CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM

外国特許コード F110004415
整理番号 K01408WO
掲載日 2011年7月15日
出願国 カナダ
出願番号 2556782
公報番号 2556782
公報番号 2556782
出願日 平成17年2月25日(2005.2.25)
公報発行日 平成17年9月9日(2005.9.9)
公報発行日 平成25年6月4日(2013.6.4)
優先権データ
  • 特願2004-053123 (2004.2.27) JP
  • 特願2004-197877 (2004.7.5) JP
  • 特願2005-005371 (2005.1.12) JP
発明の名称 (英語) CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM
発明の概要(英語)

The present invention provides a novel carbon-based material in which carbons different in property are combined in such a manner as to be applicable to a device. The carbon-based thin film provides a carbon-based thin film 10 including first phases 1 that contain amorphous carbon and extend in a film thickness direction, and a second phase 2 that contains a graphite structure and intervenes between the first phases 1. In the thin film, at least one selected from the group consisting of the following a) to e) is satisfied: a) the second phase contains more graphite structures per unit volume than the first phases

b) a density of the second phase is larger than that of the first phases

c) an electric resistivity of the second phase is lower than that of the first phases

d) an elastic modulus of the second phase is higher than that of the first phases

and e) in the second phase, a basal plane of the graphite structure is oriented along the film thickness direction.

  • 出願人(英語)
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • 発明者(英語)
  • IWAMURA, EIJI
国際特許分類(IPC)
参考情報 (研究プロジェクト等) PRESTO Structural Ordering and Physical Properties AREA
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