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Method and device for moving a body having high load

外国特許コード F110004868
整理番号 N021-05WO
掲載日 2011年7月22日
出願国 大韓民国
出願番号 20067023895
公報番号 20070012483
公報番号 100891605
出願日 平成18年11月14日(2006.11.14)
公報発行日 平成19年1月25日(2007.1.25)
公報発行日 平成21年4月8日(2009.4.8)
国際出願番号 JP2005009229
国際公開番号 WO2005114825
国際出願日 平成18年11月14日(2006.11.14)
国際公開日 平成17年12月1日(2005.12.1)
優先権データ
  • 特願2004-150134 (2004.5.20) JP
発明の名称 (英語) Method and device for moving a body having high load
発明の概要(英語) A method and a device for precisely resisting and moving a high load capable of accurately moving a mobile body in the vertical direction even when a pressing force is applied onto a large sliding surface by combining piezo elements causing shear deformation with a wedge or the piezo elements causing the shear deformation and piezo elements causing vertical deformation with the wedge.
The piezo elements causing the shear deformation are stacked on each other so that their shearing directions are different from each other and combined with the wedge so that the mobile body can be accurately moved in the vertical direction even when the pressing force is applied to the large sliding surface.
The device comprises a wedge- like moving element (23) disposed on the horizontal surface of a fixed body and to which the piezo elements (24A) causing the shear deformation are fixed, a pulse source (30) rapidly deformably driving the piezo elements (24A), and the mobile body (25) vertically moving in contact with the vertical wall surface (22) of the fixed body by the driving of the wedge-like moving element (23).
The mobile body (25) can be moved and positioned by driving and extracting the wedge-like moving element (23) in and from the mobile body (25). ® KIPO & WIPO 2007
特許請求の範囲(英語) [claim1]

piezoelectric elements cause shearing [1] (a) onto the base mounted fixed to the bottom of the wedge-shaped movement as a child,

(b) precision high load moving method features by said mobile micro-movement position by driving a rapid transformation wherein piezoelectric said wedge-shaped mobile child moved over the base, said base possible vertically up and down moving objects to wedge-shaped movement above a pull.

piezo element causes [2] (a) transverse shear deformation and laminated piezoelectric laminated piezoelectric element causing vertical deformation and on the base mounted fixed to the bottom of the wedge-shaped movement as a child,

(b) high precision load navigating said mobile micro-mobile positioning by moved by driving the rapid deformation above laminates piezo said wedge-shaped mobile child wherein all sources on, wherein said base against possible vertically up and down moving objects to wedge-shaped movement above a pull to feature.

piezoelectric shear deformation [3] (a) cause the first on the base mounted fixed to the bottom of the wedge-shaped movement as a child, and fixed cause shearing along the upper slope of the wedge-shaped movement 2 piezo

(b) precision high load moving method features by said mobile micro-movement position by driving a rapid transformation wherein piezoelectric said wedge-shaped mobile child moved over the base, said base possible vertically up and down moving objects to wedge-shaped movement above a pull.

cause shearing [4] (a) the first piezo-based on the mounted fixed to the bottom of the wedge-shaped movement as a child, fasten the upper slope of the wedge-shaped movement to space depth on shear deformation of piezoelectric

(b) by driving a rapid transformation wherein the first piezoelectric said wedge-shaped mobile child moved over the base, said base vertical and can pull a mobile space depth a possible move to wedge-shaped movement above wherein mobile micro-mobile positioning and

(c) in addition, due to the rapid deformation driven by piezoelectric elements mentioned in part 2 above based on high precision load moving method features vertical and a moveable space depth for mobile space depth micro-mobile location positioning to.

and cause [5] (a) shear piezoelectric laminated piezoelectric laminated piezoelectric element causing vertical deformation and on the base mounted piezo elements fixed to the bottom of the wedge-shaped movement as a child, as well as to top bevel of the very wedge-shaped mobile child along the slope causes shear deformation and fixed and laminated piezoelectric laminated piezoelectric element causing the transverse shear deformation space back to the direction and

(b) stacked pie by laminated piezoelectric element is fixed to the bottom of the wedge-shaped mobile child said to drive rapid deformation of laminated piezoelectric element fixed above upper bevel to the transverse shear deformation along the slope to elements with wedge-shaped mobile child wherein moved over the base, said base possible vertically up and down moving objects to wedge-shaped movement above a pull by said mobile positioning of micro-movement, also said top bevel to the fixed zone of elements To drive rapid deformation space depth shearing device that enables said mobile micro-mobile positioning in the above-mentioned paper depth to feature dense high load-bearing movement technique.

based on piezo No. 1 cause [6] (a) transverse shear deformation with walls on both sides are mounted is fixed to the bottom of the triangle-shaped wedge-shaped mobile child section has hypotenuse 2 pieces at the top and to the top bevel on both sides of the wedge-shaped mobile fixed and piezo each cause shearing along the space depth second and third

(b) by rapid deformation driven by piezo element wherein the first to wedge-shaped movement above to move left or right over the base, base for vertical and space two movable in the depth direction of mobile to wedge-shaped movement wherein a pull by the sum of the above two mobile vertical position energy is unchanged, travellers can also have piezoelectric elements mentioned in part 2 and part 3 deformation rapid drive through micro-movement wherein transfer motion in vertical direction High precision load move how do wherein mobile micro-move positioning depth space to feature.

piezoelectric shear [7] (a) to have the wall on both sides on the base mounted to securing the bottom of the triangle-shaped wedge-shaped mobile child section will have hypotenuse two upper top bevel on both sides of the wedge-shaped mobile child rain ESO elements in each cause shearing along the slope and fixed and laminated piezoelectric element causing the transverse shear deformation space depth and stacking pins ESO element

(b) on the above basis schematically can pull a mobile wherein piezo element is fixed to the base of the triangle-shaped wedge-shaped mobile child section will have slope 2 upper and piezoelectric element causing shearing above slopes along rapid transformation driven by moved over the base wherein a wedge moving child, wherein said base vertical possible up and down in the depth direction moveable on paper two to wedge-shaped movement above wherein We said mobile micro-mobile positioning remains the sum of the potential energy of the vertical movement of two travellers, also placed above upper bevel to the rapid transformation driven by piezoelectric shear deformation cause wherein space depth by wherein space depth when high precision load moving method features wherein mobile micro-mobile positioning to the direction.

On the base primary cause shearing 1 piezo with walls on both sides mounted in securing the bottom of the triangle-shaped wedge-shaped mobile child section will have hypotenuse two upper top bevel on both sides of the wedge-shaped mobile child based paper against the vertical depth move possible, by holding a piezo shear deformation cause space depth in each second and third the first piezoelectric driven rapid transformation to wedge-shaped movement above to move left or right on the base of the first And resting on the base as the second through fourth cause shearing high precision load moving equipment by sum of the above two mobile vertical position energy does not change travellers said mobile vertical micro-migration positioning, also have piezoelectric elements mentioned in part 2 and part 3 deformation rapidly driven by two moving bodies to wedge-shaped movement above a pull, do said mobile micro-move positioning depth paper pinned to the bottom of the base of the first piezo said no. Piezoelectric precision high load transfer method of high precision load moving method features 4 piezo elements to drive rapid transformation by moving horizontally on wherein said second base wherein high precision load moving equipment enables xyz positioning of said body [9] claim 8 piezo element mentioned in no. 2 and no. 3 causes shear deformation in slope direction and depth of space transverse shear deformation caused this to method by laminated piezoelectric laminated piezoelectric element and features high precision load moving.

Is placed to the left of the [10] based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power which is placed to the right of the first fixed the first piezo and piezo shear deformation cause space depth above inclined plane is the second wedge-shaped mobile child and based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric device power will cause transverse shear deformation space depth 3 piezoelectric and bevel said no. Moved over the base wedge-shaped mobile children of said first and second by rapid transformation driven by piezoelectric elements of the first and third, and a wedge-shaped mobile child no. 2 fixed and 4 piezo, the bridge in the first wedge-shaped movement and 2 wedge-shaped mobile operators mobile is placed wherein mobile movable up and down a vertical space left/right and up/down micro-mobile location positioning, also have piezoelectric elements mentioned in no. 2 and no. 4 variants rapidly driven by High precision load-bearing move how do micro mobile positioning in space depth direction wherein mobile to feature.

Is placed to the left of the [11] based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power a laminated 1 piezo and piezo wherein inclined surface slope direction causes shear deformation and piezoelectric element causing the transverse shear deformation space depth and laminated piezoelectric element power will placed on the right side of the wedge-shaped mobile child no. 1 fixed 2 piezo and based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes no. 3 Pierre zo laminated elements and wherein inclined surface slope direction cause shear piezoelectric element and piezoelectric element causing the transverse shear deformation space depth and laminated piezoelectric element power becomes placed mobile be bridged in wedge-shaped mobile children of the first and second wedge-shaped mobile children, and a wedge-shaped mobile children of second 4 pin ESO elements and fixed first and I shall 3 piezo drive rapid transformation that moved over the base wedge-shaped mobile children of said first and second, Wherein mobile movable up and down a vertical space left and right, and high precision load moving method can also have piezoelectric elements mentioned in no. 2 and no. 4 variants rapidly drive through micro-move vertically to small mobile positioning in the space depth said mobile features.

piezo element is placed on the surface of the body [12] (a) fixed horizontal, transverse shear deformation is fixed on the bottom wedge-shaped movement and a

(b) to drive the rapid transformation wherein piezoelectric pulse source and

(c) driving of wedge-shaped movement above provides and possible vertically up and down movement of the above-mentioned fixed horizontal plane,

(d) high precision load moving equipment features above fading to wedge-shaped movement wherein a pull by said moving mobile positioning.

piezo element is placed on the surface of the body [13] (a) fixed horizontal, transverse shear deformation and wedge-shaped mobile child laminated piezoelectric laminated piezoelectric element causing vertical deformation and is anchored to the bottom and

(b) to drive the rapid transformation wherein piezoelectric pulse source and

(c) driving of wedge-shaped movement above provides and possible vertically up and down movement of the above-mentioned fixed horizontal plane,

(d) high precision load moving equipment features above fading to wedge-shaped movement wherein a pull by said moving mobile positioning.

High precision load moving equipment [14] wherein 12 high precision load moving equipment, securing the top of wedge-shaped movement above 2 piezo in addition to features.

High precision load moving equipment that high precision load moving equipment [15] claim 14, wherein said second piezo multilayer piezoelectric elements to feature.

[16] claim 14 high precision load moving equipment instructions, the high precision load moving equipment features piezo shear a second Piezo print depth by

High precision load moving equipment that the [17] wherein 15 high precision load moving equipment, said 2 laminated piezoelectric shear direction a piezo and piezo shear depth paper laminated to feature.

High precision load moving equipment of 15 [18] claim, wherein said second laminated piezoelectric element

The slope direction shear piezo and piezo elements to stretch the normal direction to laminate and shall so high precision load moving equipment features that.

Fixing the piezo No. 3 of said body of 12 [19] claim high precision load moving equipment, further contact with said fixed body wall side faces to feature precision high resistance load moving equipment.

High precision load moving equipment to fixing 3 laminated piezoelectric element of said body of 13 [20] claim high precision load moving equipment, further contact with said fixed body wall side surface.

piezoelectric shear [21] (a) to have the wall on both sides based on the resting to prepare for at the bottom of the wedge-shaped mobile children of triangular cross section that is top bevel on both sides of the wedge-shaped movement equipped with piezoelectric shear deformation cause space depth in each, (b) by driving wedge-shaped mobile child bottom wherein piezoelectric rapid transformation wherein wedge-shaped mobile child moved over the base and 2 movable space depth and the vertical direction on each side of the wedge-shaped mobile child apologise, That means can also have piezoelectric space depth placed above upper bevel to cause shear deformation rapidly driven and equipped with a means of micro mobile positioning of said body like does not change the sum of the above two mobile vertical position energy left and right and up and down, pull the said mobile space depth direction, make a small move positioning to feature high precision load moving equipment.

piezoelectric shear [22] (a) to have the wall on both sides on the base mounted to bottom of the wedge-shaped mobile children of triangular cross section that is to prepare for top bevel on both sides of the wedge-shaped mobile child and piezo each cause, shear deformation in slope direction with laminated piezoelectric laminated piezoelectric element causing the transverse shear deformation space depth and

(b) fixed upper bevel with wedge-shaped mobile child bottom wherein piezoelectric laminate, equipped with a means of positioning of micro-moving said vehicles like remains pulled out a wedge-shaped mobile children by driving the rapid deformation cause shearing said slope direction of piezo piezo said wedge-shaped mobile child moved over the base, vertical and space depth can be moved left and right two mobile that the sum of the above two mobile vertical position energy left and right and up and down In addition, high precision load moving equipment features that means rapid deformation driven by piezo element of laminated piezoelectric element placed above upper bevel to cause shear said space depth that the said mobile space depth direction, make a small mobile positioning.

is placed to the left of the [23] (a) based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric device power be wedge-shaped mobile child no. 1 fixed 1 piezo and piezo shear deformation cause space depth above inclined plane is the second and

(b) is placed right on the base of the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes fixed 3 piezo and piezo shear deformation cause space depth above inclined plane is the fourth and the second forced and equipped with a mobile child,

(c) placed a shifter that bridge in the first wedge-shaped movement and 2 wedge-shaped mobile operators, to drive rapid transformation wherein piezoelectric elements by wedge-shaped mobile children of said first and second moved over the base, said mobile movable space depth and the vertical direction to the sum of the above two mobile vertical position energy funny and staffed by small mobile positioning space left/right and up/down resistors also, That means rapid transformation driven by piezoelectric element causing shearing along the above-mentioned space depth that the said mobile space depth direction, make a small mobile positioning to feature precision high load moving equipment.

is placed to the left of the [24] (a) based on the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes 1 piezo and piezo wherein inclined surface slope direction cause shearing and space depth shear deformation KIA this be laminated piezoelectric element and laminated piezoelectric element power becomes fixed and 2 piezo wedge-shaped mobile child no. 1 and

(b) is placed right on the base of the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes 3 piezo and piezo wherein inclined surface slope direction cause shearing and space depth shear deformation KIA this to laminated piezoelectric element strength laminated piezoelectric element and a 4 piezo elements and fixed and is wedge-shaped mobile children of 2 and a

(c) placed a shifter that bridge in the first wedge-shaped movement and 2 wedge-shaped mobile operators, to drive rapid transformation wherein piezoelectric elements by wedge-shaped mobile children of said first and second moved over the base, said mobile movable space depth and the vertical direction to the sum of the above two mobile vertical position energy funny and staffed by small mobile positioning space left/right and up/down resistors also, That means rapid transformation driven by piezoelectric element causing shearing along the above-mentioned space depth that the said mobile space depth direction, make a small mobile positioning to feature precision high load moving equipment.

(a) is placed to the left of the base on the bottom has a level, on the top inside the lower slopes, piezo element forces cause the piezo element wherein said bottom cause shear and longitudinal deformation becomes 1 1 laminated piezoelectric element and cause transverse shear deformation space depth above inclined plane is the second peak ESO elements with wedge-shaped mobile child and

(b) is placed right on the base of the inclined plane horizontally, lower inner surface which has a bottom piezo element forces cause the piezo element wherein said bottom cause shear and longitudinal deformation becomes and a wedge-shaped mobile child no. 2 with 3 laminated piezoelectric element and cause shearing space depth above inclined plane is 4 Pi ESO element

(c), and equipped with means moved over the base wedge-shaped mobile children of said first and second placed a shifter that bridge in the first wedge-shaped movement and 2 wedge-shaped mobile operators, to drive rapid transformation wherein piezoelectric elements by a moveable space depth and the vertical direction above fading to wedge-shaped movement above rivet, pull said mobile space horizontally and vertically to make a small move positioning also That means rapid transformation driven by piezoelectric element causing shearing along the above-mentioned space depth that the said mobile space depth direction, make a small mobile positioning to feature precision high load moving equipment.

(a) is placed to the left on the base of the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes 1 2 1 piezo and piezo wherein inclined surface slope direction causes shear deformation and piezoelectric elements causes vertical distortion and laminated piezoelectric element and an wedge-shaped mobile child and

(b) is placed right on the base of the inclined plane horizontally, lower inner surface which has a bottom wherein said bottom shear piezoelectric element power becomes and a wedge-shaped mobile child no. 2 4 3 piezo and piezo wherein inclined surface slope direction causes shear deformation and piezoelectric elements causes vertical distortion and laminated piezoelectric element and an

(c) high precision load moving equipment features wherein mobile micro-mobile positioning method by moved over the base wedge-shaped mobile children of said first and second placed a shifter that bridge in the first wedge-shaped movement and 2 wedge-shaped mobile operators, to drive rapid transformation wherein piezoelectric elements by a moveable space depth and the vertical direction above fading to wedge-shaped movement above rivet pull that.
  • 出願人(英語)
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • 発明者(英語)
  • KAWAKATSU HIDEKI
国際特許分類(IPC)
参考情報 (研究プロジェクト等) CREST Nano Factory and Process Monitoring for Advanced Information Processing and Communication AREA
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