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Infrared focusing device

外国特許コード F110005248
整理番号 B15-01US
掲載日 2011年8月29日
出願国 アメリカ合衆国
出願番号 51907803
公報番号 20050254121
公報番号 7391564
出願日 平成15年4月22日(2003.4.22)
公報発行日 平成17年11月17日(2005.11.17)
公報発行日 平成20年6月24日(2008.6.24)
国際出願番号 JP2003005104
国際公開番号 WO2004003519
国際出願日 平成15年4月22日(2003.4.22)
国際公開日 平成16年1月8日(2004.1.8)
優先権データ
  • 特願2002-188508 (2002.6.27) JP
  • 2003WO-JP05104 (2003.4.22) WO
発明の名称 (英語) Infrared focusing device
発明の概要(英語) (US7391564)
An infrared light condensing apparatus that focuses an infrared light of several tens microns in wavelength at a microfine area of submicron or less and also a near-field from a microfine area of submicron or less, and permits a scanning image to be obtained.
It includes a solid immersion lens including a medium of high index of refraction for coupling an incident light or an outgoing light to an antenna, a measured specimen disposed on a base plane of the solid immersion lens, an antenna disposed away from the base plane at a distance ¼ of an effective wavelength of the light for causing the light to geometrically resonate therewith, a rod-like conductive probe having a sharply point end projecting from the antenna, and a position control means such as a triaxial XYZ mechanical stage for controlling the position of the probe with the intermediary of a cantilever.
特許請求の範囲(英語) [claim1]
1. An infrared light condensing apparatus, comprising: a solid immersion lens for accepting an incident light or emitting an outgoing light, said solid immersion lens having a base plane on which a specimen is disposed in direct contact with the solid immersion lens;
an antenna comprising an electrically conductive material, the antenna having a probe disposed away from said base plane of said solid immersion lens at a distance not more than 1/4 of an effective wavelength of the light;a holder means for retaining said antenna;
and
a position control means for controlling a position of a tip of said probe by means of said holder means,wherein operating said position control means allows:the incident light to concentrate as a near-field at a desired position of the specimen on the base plane of said solid immersion lens ora near-field from a desired position of the specimen to be converted into a propagating wave corresponding thereto and then the propagating wave to be emitted as said outgoing light from said solid immersion lens.
[claim2]
2. An infrared light condensing apparatus as set forth in claim 1, wherein said solid immersion lens comprises a medium that is low in absorption coefficient and large in dielectric constant for wavelengths of said incident or outgoing light.
[claim3]
3. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said antenna comprises an electric conductor having a length that is one half of the effective wavelength of said incident or outgoing light to condense the incident light upon causing it to geometrically resonate orto pick up a near-field from said specimen in a region of the pointed tip of said probe upon causing it to geometrically resonate and then to emit it as a wave propagating in the medium of said solid immersion lens.
[claim4]
4. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein the tip of said probe is a sharply pointed end of a rod-like electric conductor having a radius of curvature less than a diffraction limit of said incident or outgoing light and is configured to project from said electric conductor towards said specimen to cause the geometrically resonating incident light condensed on said antenna to concentrate as a near-field at said probe tip orto take out a near-field from a surface of said specimen.
[claim5]
5. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said holder means comprises an arm and said position control means comprises a triaxial XYZ mechanical stage.
[claim6]
6. An infrared light condensing apparatus as set forth in claim 1 or 2, wherein said holder means comprises a cantilever having a rear face reflecting an incident laser light and said position control means is adapted to respond to a change in angle of reflection of the laser light at the cantilever rear face for controlling the distance between said probe tip and the surface of said specimen.
[claim7]
7. An infrared light condensing apparatus as set forth in claim 1, wherein said holder means is a cantilever.
[claim8]
8. An infrared light condensing apparatus as set forth in claim 7, wherein said cantilever is scanned by said position control means.
[claim9]
9. An infrared light condensing apparatus as set forth in claim 7, wherein said position control means controls the distance between said probe tip and the surface of said specimen, responding to a change in angle of reflection of the laser light at the rear face of said cantilever.
  • 発明者/出願人(英語)
  • KOMIYAMA SUSUMU
  • IKUSHIMA KENJI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
参考情報 (研究プロジェクト等) SORST Selected in Fiscal 2001
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