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Homodyne laser interferometer probe and displacement measurement system using the same

外国特許コード F110005509
整理番号 N021-09WO
掲載日 2011年9月7日
出願国 アメリカ合衆国
出願番号 81743806
公報番号 20090079990
公報番号 07847953
出願日 平成20年2月29日(2008.2.29)
公報発行日 平成21年3月26日(2009.3.26)
公報発行日 平成22年12月7日(2010.12.7)
国際出願番号 PCT/JP2006/303935
国際公開番号 WO2006/093210
国際出願日 平成18年3月2日(2006.3.2)
国際公開日 平成18年9月8日(2006.9.8)
優先権データ
  • 特願2005-056753 (2005.3.2) JP
発明の名称 (英語) Homodyne laser interferometer probe and displacement measurement system using the same
発明の概要(英語) A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a 1/4 wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the 1/4 wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4). Here, the reference light from the reflection mirror (6) is returned to measurement means along the same route. The measurement light from the second focal lens (7) is applied to a measurement object (8), and the measurement light (signal light) from the measurement object (8) is returned to the measurement means along the same route.
  • 発明者/出願人(英語)
  • Kawakatsu, Hideki; Tokyo [JP]
  • Japan Science and Technology Agency, Kawaguchi-shi [JP]
国際特許分類(IPC)
米国特許分類/主・副
  • 356/501
  • 356/482
参考情報 (研究プロジェクト等) CREST Nano Factory and Process Monitoring for Advanced Information Processing and Communication AREA
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