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Composite material comprising silicon matrix and method of producing the same 実績あり

外国特許コード F110005544
整理番号 N072-15WO
掲載日 2011年9月7日
出願国 アメリカ合衆国
出願番号 92063809
公報番号 20110151242
公報番号 8980420
出願日 平成21年3月2日(2009.3.2)
公報発行日 平成23年6月23日(2011.6.23)
公報発行日 平成27年3月17日(2015.3.17)
国際出願番号 JP2009053867
国際公開番号 WO2009110428
国際出願日 平成21年3月2日(2009.3.2)
国際公開日 平成21年9月11日(2009.9.11)
優先権データ
  • 特願2008-054506 (2008.3.5) JP
  • 2009JP053867 (2009.3.2) WO
発明の名称 (英語) Composite material comprising silicon matrix and method of producing the same 実績あり
発明の概要(英語) Proposed are a composite material, wherein non-penetrating pores that are formed in a silicon surface layer are filled up with a metal or the like without leaving any voids by using the plating technique, and a method of producing the composite material.
A composite material, which has been packed at a high accuracy, or in other words, in which little voids are left, can be obtained by filling up non-penetrating pores that are formed from a silicon surface (100) substantially with a second metal or an alloy of the second metal (106) with the use of the autocatalytic electroless plating technique wherein a first metal located at the bottom of the non-penetrating pores as described above serves as the starting point.
特許請求の範囲(英語) [claim1]
1. A composite material comprising a silicon matrix, the composite material comprising: non-penetrating pores in a silicon surface, the non-penetrating pores having a side surface and a bottom surface and a maximum depth of 180 nm;
a first metal in direct contact with the bottom surface of the non-penetrating pores; and
a second metal, or an alloy thereof, substantially filling the remaining volume of the non-penetrating pores and in direct contact with the side surface of the non-penetrating pores and in direct contact with the first metal,
wherein the first metal is in the shape of particles or islands within the non-penetrating pores.
[claim2]
2. The composite material of claim 1, wherein: the silicon surface is porous by provision of the non-penetrating pores.
[claim3]
3. The composite material of claim 1 or 2, wherein: the first metal comprises at least one metal selected from palladium (Pd), silver (Ag), gold (Au), platinum (Pt), and rhodium (Rh).
[claim4]
4. The composite material of claim 1 or 2, wherein: the first metal is silver (Ag) or gold (Au), and the second metal is cobalt (Co).
[claim5]
5. The composite of claim 1, wherein the non-penetrating pores are substantially filled with the second metal or alloy thereof by autocatalytic electroless plating.
[claim6]
6. The composite of claim 1, wherein the first metal is in the shape of particles.
[claim7]
7. The composite of claim 1, wherein the first metal is in the shape of islands.
  • 発明者/出願人(英語)
  • YAE SHINJI
  • HIRANO TATSUYA
  • MATSUDA HITOSHI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
米国特許分類/主・副
  • 428/305.5
  • 428/131
  • 428/546
  • 428/548
参考情報 (研究プロジェクト等) CREST Development of Advanced Nanostructured Materials for Energy Conversion and Storage AREA
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