TOP > 外国特許検索 > Method of performing high-efficiency machining by high-density radical reaction using a rotating electrode, device for performing the method and the rotating electrode used therefor

Method of performing high-efficiency machining by high-density radical reaction using a rotating electrode, device for performing the method and the rotating electrode used therefor

外国特許コード F110005570
整理番号 R001P02US
掲載日 2011年9月8日
出願国 アメリカ合衆国
出願番号 79329397
公報番号 05935460
出願日 平成9年3月11日(1997.3.11)
公報発行日 平成11年8月10日(1999.8.10)
国際出願番号 PCT/SE97/00047
国際公開番号 WO97/02917
国際出願日 平成9年1月15日(1997.1.15)
国際公開日 平成9年1月30日(1997.1.30)
優先権データ
  • 特願平07-176476 (1995.7.12) JP
発明の名称 (英語) Method of performing high-efficiency machining by high-density radical reaction using a rotating electrode, device for performing the method and the rotating electrode used therefor
発明の概要(英語) There are provided a method for performing high-efficiency machining by high-density radical reaction using a rotating electrode, in which a large amount of the reaction gas is supplied to a machining gas between a machining electrode and a workpiece under control, and the limit value of a making power is elevated so that the density of neutral radicals is increased to remarkably improve the machining rate 10 to 100 times as large as the conventional machining rate, and the prevention of arc discharge and the thermal stabilization are made. An endless machining electrode and the workpiece are disposed in gas atmosphere containing a reactive gas and an inactive gas with a machining gap therebetween, and a high-frequency power is supplied to the machining electrode, and the machining electrode is rotated at a high speed to move the surface of the machining electrode with respect to the machining progress portion at a high speed and to catch the gas by the surface of the machining electrode, thereby forming a gas flow which is transverse to the machining gap, and a volatile material generated by the radical reaction of the neutral radicals produced in plasma generated in the machining gap with atoms or molecules which constitute the machining progress portion of the workpiece is gasified and removed to progress machining.
  • 発明者/出願人(英語)
  • Mori, Yuzo; Katano [JP]
  • Ishikawa, Toshio; Nara [JP]
  • Japan Science and Technology Corporation, Kawaguchi [JP]
国際特許分類(IPC)
米国特許分類/主・副
  • 219/121.59
  • 219/121.52
  • 219/121.43
  • 219/121.39
  • 219/121.51
  • 219/69.1
  • 83/16
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