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Plasma etching method, plasma etching device, and method for producing photonic crystal

外国特許コード F110005811
整理番号 AF08-03WO
掲載日 2011年10月19日
出願国 アメリカ合衆国
出願番号 200913061252
公報番号 20110151673
公報番号 8986558
出願日 平成21年8月27日(2009.8.27)
公報発行日 平成23年6月23日(2011.6.23)
公報発行日 平成27年3月24日(2015.3.24)
国際出願番号 JP2009004178
国際公開番号 WO2010023925
国際出願日 平成21年8月27日(2009.8.27)
国際公開日 平成22年3月4日(2010.3.4)
優先権データ
  • 特願2008-224035 (2008.9.1) JP
  • 2009JP004178 (2009.8.27) WO
発明の名称 (英語) Plasma etching method, plasma etching device, and method for producing photonic crystal
発明の概要(英語) A plasma etching method capable of oblique etching with a high aspect ratio and high uniformity is provided.
In the plasma etching method, a base body is etched with a high aspect ratio by the following process: An electric-field control device having an ion-introducing orifice penetrating therethrough in a direction inclined from the normal to the surface of a base body is placed on or above the surface of this base body.
Plasma is generated on the surface of the base body on or above which the electric-field control is placed.
A potential difference is formed between the plasma and the base body so as to attract ions in the plasma toward the base body.
特許請求の範囲(英語) [claim1]
1. A plasma etching method, wherein a base body is etched by a process including: placing an electric-field shaping device on or above a surface of a base body, the electric-field shaping device having an ion-introducing orifice whose diameter is larger than a thickness of an ion sheath formed by plasma, the ion-introducing orifice penetrating fully from a first surface to a second surface in a direction inclined from a normal to the surface of the base body, and shaping an electric field in the ion-introducing orifice;
generating plasma on the surface of the base body on or above which the electric-field shaping device is placed; and
forming a potential difference between the plasma and the base body so as to attract ions in the plasma toward the base body, thereby directing the ions to the surface of the base body through the ion-introducing orifice.
[claim2]
2. The plasma etching method according to claim 1, wherein the ion-introducing orifice extends in a direction perpendicular to a surface of the electric-field shaping device.
[claim3]
3. The plasma etching method according to claim 1, wherein the ion-introducing orifice has a larger cross section at a surface of the electric-field shaping device and a smaller cross section inside the electric-field shaping device.
[claim4]
4. The plasma etching method according to claim 1, wherein the ion-introducing orifice has a plurality of holes extending in different directions from one mouth provided on a side facing the base body.
[claim5]
5. The plasma etching method according to claim 1, wherein the electric-field shaping device is moved along the surface of the base body while the aforementioned potential difference is formed.
[claim6]
6. The plasma etching method according to claim 5, wherein the electric-field shaping device has a plurality of the ion-introducing orifices.
[claim7]
7. The plasma etching method according to claim 1, wherein a gap is formed between the surface of the base body and the electric-field shaping device.
[claim8]
8. The plasma etching method according to claim 1, wherein a mask having a plurality of holes arranged in a predetermined pattern is placed at a mouth of the ion-introducing orifice facing the base body.
[claim9]
9. The plasma etching method according to claim 1, wherein the direction of inclination of the ion-introducing orifice in the electric-field shaping device is designed to be variable.
[claim10]
10. The plasma etching method according to claim 1, wherein an area of a mouth of the ion-introducing orifice in the electric-field shaping device is designed to be variable.
[claim11]
11. A method for producing a photonic crystal, wherein a dielectric base body is etched in a predetermined pattern by a process including the following steps: a mask having a plurality of holes in a predetermined pattern is set at a hole creation area which is a portion of a surface of the base body;
an electric-field shaping device having an ion-introducing orifice whose diameter is larger than a thickness of an ion sheath formed by plasma, the ion-introducing orifice penetrating fully from a first surface to a second surface in a direction inclined from a normal to the surface of the base body is placed so that an electric field in the ion-introducing orifice is shaped and a mouth of the ion-introducing orifice facing the base body is adjusted at a position of the hole creation area;
plasma is generated on the surface of the base body on or above which the electric-field shaping device is placed; and
a potential difference is formed between the plasma and the base body so as to direct ions in the plasma toward the surface of the base body through the ion-introducing orifice.
[claim12]
12. The method for producing a photonic crystal according to claim 11, wherein performing the etching process multiple times while changing an orientation of the electric-field shaping device each time.
[claim13]
13. The method for producing a photonic crystal according to claim 12, wherein: a) in a first etching stage: a-1) a mask with holes formed for a plurality of belt-like areas is used, where the holes formed for a 4nth belt-like area (where n is an integer) are arranged with spatial period a1 and the holes formed for a 4n+2nd belt-like area are arranged with spatial period a1 and displaced by a1/2 in a longitudinal direction of the belt-like areas;
a-2) the electric-field shaping device is arranged so that the ion-introducing orifice becomes inclined at a first angle from a normal to the surface of the base body in an extending direction of the belt-like areas;
b) in a second etching stage: b-1) a mask with holes is used, where the holes formed for a 4n+1st belt-like area are arranged with spatial period a1 and the holes formed for a 4n+3rd belt-like area are arranged with spatial period a1 and displaced by a1/2 in a longitudinal direction of the belt-like areas; and
b-2) the electric-field shaping device is arranged so that the ion-introducing orifice becomes inclined at a second angle, which is different from the first angle, from a normal to the surface of the base body in an extending direction of the belt-like areas.
[claim14]
14. The method for producing a photonic crystal according to claim 11, wherein the ion-introducing orifice has a plurality of holes extending in three directions from one mouth provided on a side facing the surface of the base body.
  • 発明者/出願人(英語)
  • NODA SUSUMU
  • TAKAHASHI SHIGEKI
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
国際特許分類(IPC)
米国特許分類/主・副
  • 216/24
  • 216/56
  • 216/67
  • 438/710
  • 438/731
参考情報 (研究プロジェクト等) CREST Photonics and Quantum Optics for the Creation of Innovative Functions AREA
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