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Comb-structured MEMS accelerometer

外国特許コード F120006120
整理番号 S2008-0662
掲載日 2012年1月6日
出願国 アメリカ合衆国
出願番号 99627009
公報番号 20110138931
公報番号 8770043
出願日 平成21年6月5日(2009.6.5)
公報発行日 平成23年6月16日(2011.6.16)
公報発行日 平成26年7月8日(2014.7.8)
国際出願番号 JP2009060364
国際公開番号 WO2009148156
国際出願日 平成21年6月5日(2009.6.5)
国際公開日 平成21年12月10日(2009.12.10)
優先権データ
  • 特願2008-148657 (2008.6.5) JP
  • 2009JP060364 (2009.6.5) WO
発明の名称 (英語) Comb-structured MEMS accelerometer
発明の概要(英語) An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration.
An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate.
With respect to the fixed combtooth portions that are adjacent to each other and the movable combtooth portion inserted therebetween, the spacing between one of the fixed combtooth portions and the movable combtooth portion is different from the spacing between another of the fixed combtooth portions and the movable combtooth portion.
特許請求の範囲(英語) [claim1]
1. A detection sensor, comprising: a comb electrode, including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions;
a power supply, connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and
a detection unit for detecting an external force or acceleration based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate,
wherein with respect to the fixed combtooth portions that are adjacent to each other and the movable combtooth portion inserted therebetween, the spacing between one of the fixed combtooth portions and the movable combtooth portion is different from the spacing between another of the fixed combtooth portions and the movable combtooth portion, and
wherein the power supply changes a direction of vibration of the movable electrode by switching the prescribed frequency, between a first resonance frequency which causes vibration in an arrangement direction of the movable combtooth portions, and a second resonance frequency which causes vibration in an extension direction of the movable combtooth portions,
wherein the movable electrode vibrates in the arrangement direction of the movable combtooth portions at the first resonance frequency, and vibrates in the extension direction of the movable combtooth portions at the second resonance frequency; and
wherein the power supply generates a signal in which a DC bias signal is superposed on the signal at the prescribed resonance frequency.
[claim2]
4. A detection sensor, comprising: a comb electrode, including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions;
a power supply, connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at resonance frequencies through an electrostatic force on the fixed electrode; and
a detection unit for detecting an external force or acceleration based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate,
wherein with respect to the fixed combtooth portions that are adjacent to each other and the movable combtooth portion inserted therebetween, the spacing between one of the fixed combtooth portions and the movable combtooth portion is different from the spacing between another of the fixed combtooth portions and the movable combtooth portion,
wherein the power supply generates a signal in which are superposed a first resonance frequency which causes the movable electrode to vibrate in an arrangement direction of the movable combtooth portions, and a second resonance frequency which causes the movable electrode to vibrate in an extension direction of the movable combtooth portions; and
wherein a DC bias signal is superposed on said signal generated by said power supply.
[claim3]
2. The detection sensor according to claim 1, wherein the length of the fixed combtooth portions in a direction perpendicular to an extension direction and an arrangement direction of the fixed combtooth portions are different from the length of the movable combtooth portions in a direction perpendicular to an extension direction and an arrangement direction of the movable combtooth portions, and the power supply imparts electric power at a resonance frequency which causes vibration of the movable electrode in the direction perpendicular to the extension direction and the arrangement direction of the movable combtooth portions.
[claim4]
3. The detection sensor according to claim 1, wherein one of the first resonance frequency and the second resonance frequency is an integral multiple of the other.
[claim5]
5. The detection sensor according to claim 4, wherein the length of the fixed combtooth portions in a direction perpendicular to an extension direction and an arrangement direction of the fixed combtooth portions are different from the length of the movable combtooth portions in a direction perpendicular to an extension direction and an arrangement direction of the movable combtooth portions, and the power supply imparts electric power at a resonance frequency which causes vibration of the movable electrode in the direction perpendicular to the extension direction and the arrangement direction of the movable combtooth portions.
[claim6]
6. The detection sensor according to claim 4, wherein one of the first resonance frequency and the second resonance frequency is an integral multiple of the other.
  • 発明者/出願人(英語)
  • HASHIGUCHI GEN
  • SHIZUOKA UNIVERSITY
国際特許分類(IPC)
米国特許分類/主・副
  • 73/862.59
  • 73/514.16
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