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OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE

外国特許コード F120006960
整理番号 S2010-0805
掲載日 2012年10月26日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2011JP060855
国際公開番号 WO 2011/158579
国際出願日 平成23年5月11日(2011.5.11)
国際公開日 平成23年12月22日(2011.12.22)
優先権データ
  • 特願2010-134729 (2010.6.14) JP
発明の名称 (英語) OBJECTIVE LENS SYSTEM AND ELECTRON MICROSCOPE
発明の概要(英語)

Provided is an objective lens system and electron microscope capable of specimen observation using an electron beam accelerated to an ultra-high voltage state, even without using a direct current ultra-high voltage source, a direct current accelerator tube or multiple electromagnetic lenses for ultra-high voltage. a microwave accelerator (3) containing microwave cavities is provided on the injection side of a pair of objective lenses consisting of electromagnetic lenses (pre-objective electromagnetic lens (2a), post-objective electromagnetic lens (2b)), and a microwave decelerator (4) containing microwave cavities is provided on the output side of a pair of objective lenses. In addition, microwaves having mutually different phases are supplied to the cavities of the microwave accelerator (3) and the microwave decelerator (4) through a waveguide (6) from a high frequency power source (5).

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES,
  • NAGAYAMA IP HOLDINGS, LLC,
  • NAGAYAMA KUNIAKI,
  • NAGATANI YUKINORI,
  • ARAI YOSHIHIRO
  • 発明者(英語)
  • NAGAYAMA KUNIAKI,
  • NAGATANI YUKINORI,
  • ARAI YOSHIHIRO
国際特許分類(IPC)

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