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Transferring system and transferring method

外国特許コード F120007054
整理番号 E086P24TW
掲載日 2012年11月22日
出願国 台湾
出願番号 100131464
公報番号 201233527
公報番号 I562882
出願日 平成23年9月1日(2011.9.1)
公報発行日 平成24年8月16日(2012.8.16)
公報発行日 平成28年12月21日(2016.12.21)
優先権データ
  • 特願2010-195677 (2010.9.1) JP
発明の名称 (英語) Transferring system and transferring method
発明の概要(英語) (TWI562882)
Disclosed is a transferring system (1) for transferring a fine transfer pattern (M1) formed in a mold (M) to a molding material (D) provided on a substrate (W), the transferring system including: a positioning device (3) that is configured so as to position the substrate (W) with respect to the mold (M) and to join the mold (M) and the substrate (W) together after said positioning; and a transferring device (5) that is provided separately from the positioning device (3) and that is configured so as to receive the mold (M) and the substrate (W), which have been positioned and joined together by the positioning device (3), and to perform transferring by pressing the mold (M) and the substrate (W) and curing the molding material (D).
特許請求の範囲(英語) [claim1]

(TW201233527)
Claims machine translated from Chinese
[claim2]
1. A extension India systems, were formed the tiny extension India design and extension India to be located in the mold on the extension of India system forming of material foundation plate, its characteristic has: In order to carry on the above foundation plate to the above mold localization, after this localization, mounts to meet the above mold and above foundation plate mutually of positioning device way constitution;
With to use to be different from the thing of above positioning device to constitute and gather in the above positioning device is located, but was mounted to meet the above mold and above foundation plate mutually, holds back the above mold and above foundation plate makes the above formed material forming, carries on the extension of India way of constitution above extension India to install.
[claim3]
2. Like the extension of India system application patent scope 1st item of record, the above positioning device has the heating of method heating above foundation plate and above mold;
The above extension India installs has to be different from the heating of method above positioning device heating method;
The heating of method and heating of method above extension India installment above positioning device, both carry on way of the temperature control to be constituted by can the respective use individual setting value.
[claim4]
3. Like the extension of India system application patent scope 1st item of record, the above formed material is the thermoset resin;
The above positioning device has the heating of method heating above foundation plate and above mold, to use the heating of method above positioning device to let the temperature rise makes the temperature of above thermoset resin hardening also to lower the temperature, the heating above foundation plate and above mold, after this heating, carries on above foundation plate's to the above mold localization way constitution;
The above extension India installs has heating to be mounted to meet the heating of method above foundation plate and above mold mutually, to use the heating of method above extension India installment, the way of constitution above thermoset resin forming.
[claim5]
4. Like the extension of India system application patent scope 1st item of record, the above formed material is the ultraviolet ray hardening resin;
The above positioning device, is by using one of part above ultraviolet ray hardening resins, mounts to meet the way constitution the above mold and above foundation plate mutually.
[claim6]
5. Like the extension of India system application patent scope 1st item of record, the above formed material is the hot plastic resin;
The above positioning device has the heating of method heating above foundation plate and above mold, to use the heating of method above positioning device, lets the temperature rise to with making the above hot plastic resin conditioning and forming temperature of same level or the low temperature, the heating above foundation plate and above mold, after this heating, carries on above foundation plate's to the above mold localization way constitution;
The above extension India installs has heating to be mounted to meet the heating of method above foundation plate and above mold mutually, to use the heating of method above extension India installment, softened above hot plastic resin, and carries on to transfer the way of constitution India above tiny extension India design toward the above hot plastic resin.
[claim7]
6. 1 extension India systems, were formed the mold on the tiny extension India design, transfers India by the hot plastic resin the extension of India system foundation plate of constitution, its characteristic has: In order to carry on above foundation plate's to the above mold localization, after this localization, mounts to meet the above mold and above foundation plate mutually of positioning device way constitution, with use to be different from the thing of above positioning device to constitute and gather is located in the above positioning device and mounted to meet the above mold and above foundation plate mutually, after holding back the above mold and above foundation plate, carries on the extension of India way of constitution above extension India to install;
The above positioning device, has the heating of method heating above foundation plate and above mold, to use the heating of method above positioning device, causes the temperature rise until with making the above foundation plate conditioning and forming temperature of same level or the low temperature, the heating above foundation plate and above mold, after this heating, carries on above foundation plate's to the above mold localization way constitution;
The above extension India installs, has the heating to be mounted to meet the heating of method above foundation plate and above mold mutually, to use the heating of method above extension India installment, softened above foundation plate, and carries on to transfer the way of constitution India above tiny extension India design toward the above foundation plate.
[claim8]
7. Like extension of India systems application patent scope 1st, 2, 3, 5 and 6 items of any item of record, in the above positioning device, is by using the ultraviolet ray hardening resin, mounts to meet the way constitution the above mold and above foundation plate mutually.
[claim9]
8. Like the extension of India system application patent scope 1-7th item of any item of record, above holds back according to the above extension India installment is by using the way of constitution drum;
Mounts to meet the spot of above mold and above foundation plate in the above positioning device, installs in the above extension India from the above drum leaves.
[claim10]
9. Like the extension of India system application patent scope 1-7th item of any item of record, according to the above extension India installment above holding back, because of using the drum and mold . the foundation plate maintains the body pinches into the way of constitution above mold and above foundation plate;
Mounts to meet the spot of above mold and above foundation plate by the above positioning device, installs in the above extension India from the above mold . the foundation plate maintains the body leaves.
[claim11]
10. Like the extension of India system application patent scope 1-7th item of any item of record, according to the above extension India installment above holding back, is by using the drum and mold . the foundation plate maintains the body pinches into the way of constitution above mold and above foundation plate;
In order to use in the above drum is formed the gap and . the foundation plate placed the above mold the body is formed any of gap gaps at least, mounts to meet the spot of above mold and above foundation plate in the above positioning device, non-contacts the above drum and above mold . the foundation plate maintains any of way constitution bodies at least.
[claim12]
11. 1 kinds of extension India law, were formed the tiny extension India design and extension India to be located in the mold on the extension of India law forming of material foundation plate, its characteristic has: Carries on above foundation plate's to the above mold localization localization project;
After the localization of above localization project, mounts to meet mounting to meet the above mold and above foundation plate mutually the project;
Moves delivers above mounts to meet project to be mounted to meet the moving of above mold and above foundation plate delivers the project;
With after above moves delivers moving of project delivers, holds back mutually is mounted to meet the above mold and above foundation plate makes the above formed material forming, carries on the extension of India project above extension India.
  • 出願人(英語)
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • TOSHIBA MACHINE
  • 発明者(英語)
  • SHIMODA TATSUYA
  • KOKUBO MITSUNORI
  • SUGIURA YUKI
国際特許分類(IPC)
参考情報 (研究プロジェクト等) ERATO SHIMODA Nano-Liquid Process AREA
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