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METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR

外国特許コード F120007085
整理番号 E092P23WO
掲載日 2012年12月19日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP064054
国際公開番号 WO 2012/165536
国際出願日 平成24年5月31日(2012.5.31)
国際公開日 平成24年12月6日(2012.12.6)
優先権データ
  • 特願2011-122184 (2011.5.31) JP
発明の名称 (英語) METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR
発明の概要(英語)

[Problem] To provide a method for temperature compensation in a sensor, a computation program for the method for temperature compensation, a computation processing device for computationally processing the computation program, and a sensor, in which deformation in a diaphragm caused by a pressure change (thermal expansion of a gas sealed in a cavity) due to the temperature of the gas in the cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. [Solution] This method for temperature compensation in a capacitance-type sensor comprises executing calculation steps which include including a calculation step (S17) of acquiring the amount of change ?C' in capacitance, whereby there is obtained a parameter ?C' through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change (thermal expansion of the gas sealed in a hermetically sealed space) due to the temperature of the gas in the hermetically sealed space.

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY,
  • HAO XIUCHUN,
  • JIANG YONGGANG,
  • FUJITA TAKAYUKI,
  • HIGUCHI KOHEI,
  • MAENAKA KAZUSUKE,
  • TAKAO HIDEKUNI
  • 発明者(英語)
  • HAO XIUCHUN,
  • JIANG YONGGANG,
  • FUJITA TAKAYUKI,
  • HIGUCHI KOHEI,
  • MAENAKA KAZUSUKE,
  • TAKAO HIDEKUNI
国際特許分類(IPC)
参考情報 (研究プロジェクト等) ERATO MAENAKA Human-Sensing Fusion AREA
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