TOP > 外国特許検索 > GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY

GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY 実績あり

外国特許コード F120007090
整理番号 S2011-0740-N0
掲載日 2012年12月27日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP064687
国際公開番号 WO 2012/169588
国際出願日 平成24年6月7日(2012.6.7)
国際公開日 平成24年12月13日(2012.12.13)
優先権データ
  • 特願2011-128588 (2011.6.8) JP
発明の名称 (英語) GAS FOR PLASMA GENERATION, PLASMA GENERATION METHOD, AND ATMOSPHERIC PRESSURE PLASMA GENERATED THEREBY 実績あり
発明の概要(英語)

[Problem] The purpose of the present invention is to provide a gas for plasma generation that can easily generate a plasma from a gas that does not easily form a plasma such as oxygen, carbon monoxide, or nitric oxide, as well as to provide a plasma generation method and an atmospheric pressure plasma generated thereby. A further purpose is to enable application of plasma processing in many industrial fields by using the resulting atmospheric pressure plasma. [Solution] Provided is a gas for plasma generation used for generating an atmospheric pressure plasma. The gas for plasma generation is a mixed gas comprising a base gas (carrier gas) which not only has processing capability due to formation of a plasma, but also carries the gas for plasma generation as a whole to a plasma source, and a processing effectiveness enhancing gas that enhances the processing effectiveness of the atmospheric pressure plasma. Further, a generation support gas for supporting plasma forming is further mixed into the above mixed gas. The invention also provides a plasma generation method that uses the gas for plasma generation to generate a plasma, and an atmospheric pressure plasma that is generated from the gas for plasma generation.

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • TOKYO INSTITUTE OF TECHNOLOGY,
  • OKINO AKITOSHI,
  • MIYAHARA HIDEKAZU,
  • SASAKI RYOTA
  • 発明者(英語)
  • OKINO AKITOSHI,
  • MIYAHARA HIDEKAZU,
  • SASAKI RYOTA
国際特許分類(IPC)
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