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METAL WITH DIAMOND-LIKE CARBON FILM, AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM

外国特許コード F130007144
整理番号 S2011-0897-N0
掲載日 2013年2月6日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP065527
国際公開番号 WO 2013/011784
国際出願日 平成24年6月18日(2012.6.18)
国際公開日 平成25年1月24日(2013.1.24)
優先権データ
  • 特願2011-160258 (2011.7.21) JP
  • 特願2012-087395 (2012.4.6) JP
発明の名称 (英語) METAL WITH DIAMOND-LIKE CARBON FILM, AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM
発明の概要(英語)

The present invention addresses the problem of providing a metal with a diamond-like carbon film easily obtained by forming a diamond-like carbon film on a metal, and of providing a method for forming the diamond-like carbon film. A metal object on which the diamond-like carbon film is to be formed (30) is arranged in a flow channel (14) where the gas (RG), including methane gas, used for forming the film is directed. The gas (RG) used for forming the film is directed in a prescribed flow quantity through the flow channel (14) at the same time that the object on which the film is to be formed (30) is heated from room temperature to a predetermined temperature, whereby a reaction is created between impurities on the surface (30f) of the object on which the film is to be formed and the gas (RG) used for forming the film, resulting in removal of the impurities from the surface (30f) of the object on which the film is to be formed, and further causing a reaction from the gas (RG) used for forming the film in response to the metal elements exposed by removal of the impurities, forming the diamond-like carbon film (34) on the surface (30f) of the object on which the film is to be formed.

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • THE UNIVERSITY OF ELECTRO-COMMUNICATIONS,
  • TANAKA, KATSUMI,
  • CHOO, CHEOW KEONG
  • 発明者(英語)
  • TANAKA, KATSUMI,
  • CHOO, CHEOW KEONG
国際特許分類(IPC)
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