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Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential コモンズ

外国特許コード F130007284
整理番号 KP09-052PCT-EP
掲載日 2013年4月9日
出願国 欧州特許庁(EPO)
出願番号 11750653
公報番号 2544016
出願日 平成23年3月1日(2011.3.1)
公報発行日 平成25年1月9日(2013.1.9)
国際出願番号 JP2011054635
国際公開番号 WO2011108543
国際出願日 平成23年3月1日(2011.3.1)
国際公開日 平成23年9月9日(2011.9.9)
優先権データ
  • 特願2010-044218 (2010.3.1) JP
  • 2011JP054635 (2011.3.1) WO
発明の名称 (英語) Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential コモンズ
発明の概要(英語) In a magnetic field obtaining apparatus, a measuring part (21) that is sufficiently longer than the width of an area to be measured is disposed on a measurement plane that satisfies z = ±, and scanning in an X' direction perpendicular to the longitudinal direction of the measuring part (21) is repeated while changing an angle ¸ formed by a predetermined reference direction on the measurement plane and the longitudinal direction of the measuring part (21) to a plurality of angles.
Assuming that x' is a coordinate parameter in the X' direction, measured values f(x', ¸) obtained by repetitions of the scanning are Fourier transformed so as to obtain g(k x' , ¸) (where k x' is a wavenumber in the X' direction).
Then, g(k x' , ¸) is substituted into a predetermined two-dimensional potential obtaining equation so as to obtain Æ (x, y, ±) that indicates a two-dimensional potential on the measurement plane.
Accordingly, it is possible to perform high-resolution two-dimensional potential measurement as a result of using the measuring part (21) that is sufficiently larger than the width of an area to be measured.
特許請求の範囲(英語) [claim1]
1. A potential obtaining apparatus (1, 1a to 1c) for, assuming that phi (x, y, z) is a potential function that indicates a three-dimensional potential formed at least in the periphery of an object (9, 9a, 9c) due to the presence of said object (where x, y, and z are coordinate parameters of a rectangular coordinate system defined in mutually perpendicular X, Y, and Z directions that are set for said object), obtaining phi (x, y, alpha ) on a measurement plane (91, 92) that is set outside said object and satisfies z = alpha (where alpha is an arbitrary value),
said apparatus comprising: a measurement unit in which a plurality of linear areas that extend in a longitudinal direction parallel to said measurement plane that is parallel to an XY plane are set so as to be arranged in an X' direction perpendicular to said longitudinal direction on said measurement plane, and that is for obtaining a measured value derived from said three-dimensional potential in each of said plurality of linear areas in a state in which an angle theta formed by a reference direction that is parallel to the Y direction on said measurement plane and said longitudinal direction is changed to a plurality of angles; and a computing part (61, 63) for, assuming that x' is a coordinate parameter in the X' direction (where an origin is on a Z axis), obtaining phi (x, y, alpha ) from Equation 24 using the measured values f(x', theta ) obtained by said measurement unit, (Equation image 24 not included in text)
(where k x' is a wavenumber in the X' direction).
[claim2]
2. The potential obtaining apparatus according to claim 1, wherein said measurement unit includes: a measuring part (21, 2 1 a to 2 1 c) that extends in said longitudinal direction and is for obtaining a measured value derived from said three-dimensional potential; an angle changing part (32, 32a) for changing said angle theta formed by said reference direction and said longitudinal direction of said measuring part; a moving mechanism (33, 33a) for moving said measuring part in the X' direction relative to said object on said measurement plane such that scanning is performed in which said measuring part passes through over a measurement area of said object; and a control part (4, 62, 62a) for controlling said angle changing part and said moving mechanism such that said scanning is repeated while said angle theta is changed to a plurality of angles, wherein said measurement unit obtains measured values f(x', theta ) by repetitions of said scanning.
[claim3]
3. The potential obtaining apparatus according to claim 2, wherein
said three-dimensional potential is a potential derived by differentiating a magnetic potential once or more times with respect to the Z direction, and
said measuring part is a thin-film element that spreads in said longitudinal direction and the Z direction and generates a signal derived from said three-dimensional potential.
[claim4]
4. The potential obtaining apparatus according to claim 3, wherein
a film thickness of said thin-film element gradually decreases toward said object.
[claim5]
5. The potential obtaining apparatus according to any one of claims 2 to 4, further comprising: another moving mechanism (34, 34a) for moving said measuring part in the Z direction relative to said object, wherein said three-dimensional potential satisfies the Laplace equation, said control part obtains phi (x, y, 0) on said measurement plane that satisfies z = 0 as a two-dimensional first image (71), and after said measuring part is moved by a small distance in the Z direction relative to said object, obtains a two-dimensional intermediate image (72) using a technique similar to that used to obtain said first image, said computing part obtains a difference image between said first image and said intermediate image, divides said difference image by said small distance so as to obtain a differential image as a second image, Fourier transforms phi (x, y, 0) serving as said first image and phi z(x, y, 0) serving as said second image so as to obtain phi (k x, k y) and phi z(k x, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction), and then obtains phi (x, y, z) from Equation 25 using phi (k x, k y) and phi z(k x, k y). (Equation image 25 not included in text)
[claim6]
6. The potential obtaining apparatus according to any one of claims 1 to 4, wherein
said three-dimensional potential satisfies the Laplace equation,
phi (x, y, alpha ) obtained by one measurement is H z **(q)(x, y, 0) that is obtained by differentiating an arbitrary potential H(x, y, z) on said measurement plane that satisfies z = 0 q times with respect to z, and phi (x, y, alpha ) obtained by another measurement is H z **(p)(x, y, 0) that is obtained by differentiating said arbitrary potential H(x, y, z) p times with respect to z (where p and q are integers greater than or equal to 0, q being odd and p being even),
said computing part Fourier transforms H z **(q)(x, y, 0) and H z **(p)(x, y, 0) so as to obtain h z **(q)(k x, k y) and h z( **p)(k x, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction) and further obtains H z **(q)(x, y, z) from Equation 26 or H z **(p)(x, y, z) from Equation 27, using h z **(q)(k x, k y) and h z **(p)(k x, k y). (Equation image 26 not included in text) (Equation image 27 not included in text)
[claim7]
7. The potential obtaining apparatus according to any one of claims 1 to 6, wherein
said three-dimensional potential is a potential derived from a magnetic potential, an electric potential, temperature, or gravity.
[claim8]
8. A magnetic field microscope (1) comprising: the potential obtaining apparatus according to claim 5 for obtaining a function derived by differentiating a magnetic potential once or more times with respect to the Z direction, as phi (x, y, z), wherein said computing part substitutes a value that indicates either a position of a surface of said object or a position close to said surface into z of phi (x, y, z).
[claim9]
9. An inspection apparatus (1a) using nuclear magnetic resonance, comprising: the potential obtaining apparatus according to claim 5 for obtaining a function derived by differentiating a magnetic potential once or more times with respect to the Z direction, as phi (x, y, z); and means (11, 12) for sequentially inducing nuclear magnetic resonance inside said object on a plurality of planes located at a plurality of positions in the Z direction, wherein said control part obtains phi (x, y, z) when nuclear magnetic resonance is induced on each plane included in said plurality of planes, and said computing part substitutes a value that indicates a position of said each plane into z of phi (x, y, z) obtained for said each plane.
[claim10]
10. A potential obtaining method for, assuming that phi (x, y, z) is a potential function that indicates a three-dimensional potential formed at least in the periphery of an object (9, 9a, 9c) due to the presence of said object (where x, y, and z are coordinate parameters of a rectangular coordinate system defined in mutually perpendicular X, Y, and Z directions that are set for said object), obtaining phi (x, y, alpha ) on a measurement plane (91, 92) that is set outside said object and satisfies z = alpha (where alpha is an arbitrary value),
said method comprising the steps of: a) (S11 to S13) setting a plurality of linear areas that extend in a longitudinal direction parallel to said measurement plane that is parallel to an XY plane such that said plurality of linear areas are arranged in an X' direction perpendicular to said longitudinal direction on said measurement plane, and obtaining a measured value derived from said three-dimensional potential in each of said plurality of linear areas in a state in which an angle theta formed by a reference direction that is parallel to the Y direction on said measurement plane and said longitudinal direction is changed to a plurality of angles; and b) (S 14) assuming that x' is a coordinate parameter in the X' direction (where an origin is on a Z axis), obtaining phi (x, y, alpha ) from Equation 28 using the measured values f(x', theta ) obtained in said step a), (Equation image 28 not included in text)
(where k x' is a wavenumber in the X' direction).
[claim11]
11. The potential obtaining method according to claim 10, wherein
said step a) includes the steps of: a1) (S11) moving a measuring part (21, 21a to 21 c) in the X' direction relative to said object on said measurement plane such that scanning is performed in which said measuring part passes through over a measurement area of said object, said measuring part extending in said longitudinal direction and being for obtaining a measured value derived from said three-dimensional potential; and a2) (S12 to S13) obtaining measured values f(x', theta ) by repetitions of said step a1) while changing said angle theta formed by said reference direction and said longitudinal direction of said measuring part to a plurality of angles.
[claim12]
12. The potential obtaining method according to claim 11, wherein
said three-dimensional potential is a potential derived by differentiating a magnetic potential once or more times with respect to the Z direction, and
said measuring part is a thin-film element that spreads in said longitudinal direction and the Z direction and generates a signal derived from said three-dimensional potential.
[claim13]
13. The potential obtaining method according to claim 11 or 12, wherein
said three-dimensional potential satisfies the Laplace equation and said measurement plane satisfies z = 0, and
phi (x, y, 0) is obtained as a two-dimensional first image (71) in said steps a) and b),
said potential obtaining method comprising the steps of: c) (S22) after said measuring part is moved by a small distance in the Z direction relative to said object, obtaining a two-dimensional intermediate image (72) using a method similar to that used to obtain said first image; d) (S23) obtaining a difference image between said first image and said intermediate image and dividing said difference image by said small distance so as to obtain a differential image as a second image, e) (S24) Fourier transforming phi (x, y, 0) serving as said first image and phi z(x, y, 0) serving as said second image so as to obtain phi (k x, k y) and phi z(k h, k y) (where k x and k y are respectively wavenumbers in the X direction and the Y direction); and f) (S25) obtaining phi (x, y, z) from Equation 29 using phi (k x, k y) and phi z(k x, k y). (Equation image 29 not included in text)
[claim14]
14. The potential obtaining method according to any one of claims 10 to 13, wherein
said three-dimensional potential is a potential derived from a magnetic potential, an electric potential, temperature, or gravity.
  • 出願人(英語)
  • KOBE NATIONAL UNIVERSITY
  • 発明者(英語)
  • KIMURA KENJIRO
国際特許分類(IPC)
神戸大学連携創造本部では、神戸大学で創出された知的財産の管理,活用等を行っています。上記の公開特許に関心のある方は、下記「問合せ先」まで直接お問い合わせ下さい。

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