TOP > 外国特許検索 > PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE

PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE

外国特許コード F130007424
整理番号 S2013-0222-N0
掲載日 2013年6月20日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP065131
国際公開番号 WO 2012/173145
国際出願日 平成24年6月13日(2012.6.13)
国際公開日 平成24年12月20日(2012.12.20)
優先権データ
  • 特願2011-131743 (2011.6.14) JP
  • 特願2011-149418 (2011.7.5) JP
  • 特願2011-163193 (2011.7.26) JP
発明の名称 (英語) PROCESS FOR PRODUCING GRAPHENE MATERIAL, GRAPHENE MATERIAL, AND GRAPHENE WIRING STRUCTURE
発明の概要(英語)

A substrate main body (12) is prepared first, and a crystalline nickel layer (14) is formed over the whole of a surface of the substrate main body (12). Successively, the crystalline layer (14) is patterned zigzag by lithography to form a catalyst metal layer (16). Furthermore, titanium is deposited as a mask material (17) on the sidewalls of the catalyst metal layer (16). Subsequently, carbon atoms are supplied to the catalyst metal layer (16) by feeding a gas mixture of acetylene and argon. As a result, the nickel surface undergoes a rearrangement into the (111) plane, and the supplied carbon atoms form a hexagonal lattice to grow graphene. Since the graphene is formed on the catalyst metal layer (16), the graphene comes to have the same shape as the catalyst metal layer (16), i.e., a zigzag shape. Next, square electrodes (18, 20) are attached to both ends of the zigzag graphene. Thereafter, the catalyst metal layer (16) is dissolved away by means of an acidic solution, and the graphene is taken out as a graphene material (10).

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • MEIJO UNIVERSITY,
  • NARITSUKA, SHIGEYA,
  • MARUYAMA, TAKAHIRO
  • 発明者(英語)
  • NARITSUKA, SHIGEYA,
  • MARUYAMA, TAKAHIRO
国際特許分類(IPC)

PAGE TOP

close
close
close
close
close
close