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ELLIPSOMETRY SYSTEM

外国特許コード F130007584
整理番号 S2011-0870-C0
掲載日 2013年7月24日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP067488
国際公開番号 WO 2013/008784
国際出願日 平成24年7月9日(2012.7.9)
国際公開日 平成25年1月17日(2013.1.17)
優先権データ
  • 特願2011-154241 (2011.7.12) JP
発明の名称 (英語) ELLIPSOMETRY SYSTEM
発明の概要(英語)

[Problem] To provide an optical coherence tomograph capable of achieving size reduction and cost reduction attendant thereon, and a detection unit used therein. [Solution] An optical coherence tomograph (100) is provided with a detection unit (200) which comprises an optical polarization element (250) and detects polarization components at each wavelength while an interference polarized beam generated by causing an object reflected light beam and a reference reflected light beam to interfere with each other is separated at each wavelength. The optical polarization element (250) is configured such that the separated interference polarized beams at respective wavelengths are incident in parallel thereon in order of wavelength, and configured to have a birefringence characteristic having a first refractive index and a second refractive index that are provided with a predetermined condition, and while transmitting the incident interference polarized beam at each wavelength therethrough, to separate the interference polarized beam into polarization components and emit the separated polarization components at each wavelength in the same direction along different optical axes.

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • UTSUNOMIYA UNIVERSITY,
  • YATAGAI, TOYOHIKO,
  • ABRAHAM J. CENSE
  • 発明者(英語)
  • YATAGAI, TOYOHIKO,
  • ABRAHAM J. CENSE
国際特許分類(IPC)

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