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SPECTRAL CHARACTERISTICS MEASUREMENT DEVICE AND METHOD FOR MEASURING SPECTRAL CHARACTERISTICS

外国特許コード F130007749
掲載日 2013年12月6日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2013JP055228
国際公開番号 WO 2013/129519
国際出願日 平成25年2月27日(2013.2.27)
国際公開日 平成25年9月6日(2013.9.6)
優先権データ
  • 特願2012-044272 (2012.2.29) JP
発明の名称 (英語) SPECTRAL CHARACTERISTICS MEASUREMENT DEVICE AND METHOD FOR MEASURING SPECTRAL CHARACTERISTICS
発明の概要(英語)

In the present invention, the measurement light emitted from an object to be measured is incident on a fixed mirror and a movable mirror, thereby forming interfering light between the measurement light reflected from said fixed mirror and the measurement light reflected from said movable mirror. At this point, by moving said movable mirror, a change in the interfering light intensity for the measurement light is obtained and the interferogram of the measurement light is acquired on the basis of the change. At the same time, reference light with a wavelength in a narrow band that is a part of the wavelength band of the measurement light is incident on said fixed mirror and said movable mirror, thereby forming interfering light between the reference light reflected from said fixed mirror and the reference light reflected from said movable mirror. At this point, by moving said movable mirror, the interferogram of said measurement light is corrected on the basis of the amplitude of a change in the interfering light intensity for the reference light and the phase difference between, of said measurement light, the measurement light with the same wavelength as that of said reference light and said reference light The spectrum of said measurement light is obtained on the basis of the corrected interferogram.

  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
  • 発明者(英語)
  • ISHIMARU, ICHIRO
国際特許分類(IPC)

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