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NON-CONTACT DISCHARGE EVALUATION METHOD AND NON-CONTACT DISCHARGE EVALUATION APPARATUS

外国特許コード F140007848
整理番号 S2012-0324-C0
掲載日 2014年2月28日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2012JP080816
国際公開番号 WO 2013111445
国際出願日 平成24年11月29日(2012.11.29)
国際公開日 平成25年8月1日(2013.8.1)
優先権データ
  • 特願2012-013305 (2012.1.25) JP
発明の名称 (英語) NON-CONTACT DISCHARGE EVALUATION METHOD AND NON-CONTACT DISCHARGE EVALUATION APPARATUS
発明の概要(英語) In the present invention, level (charge quantity) and energy of discharge are evaluated by obtaining the level and the energy by means of optical measurement on the basis of light emission. A discharge source is made to generate discharge emission by applying a voltage to the discharge source from a known power supply, an intensity waveform of the discharge emission is measured using a light receiving element, and at the same time, a discharge current waveform is measured by means of a current conversion probe and a current waveform detector, and a database is generated, said database having recorded therein, considering applied power supply information, relationships with analysis data obtained by analyzing the waveforms. An intensity waveform of discharge emission generated by means of an apparatus to be measured is measured using the light receiving element, and emission data obtained by analyzing the waveform is compared with the data recorded in the database, thereby estimating the discharge level as a value.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KYUSHU INSTITUTE OF TECHNOLOGY
  • 発明者(英語)
  • OHTSUKA SHINYA
  • FURUKAWA MASAAKI
  • YAMAGUCHI YUKI
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IS KE KG KM KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG
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