TOP > 外国特許検索 > CHIP SUPPORT SUBSTRATE, METHOD FOR SUPPORTING CHIP, THREE-DIMENSIONAL INTEGRATED CIRCUIT, ASSEMBLY DEVICE, AND METHOD FOR MANUFACTURING THREE-DIMENSIONAL INTEGRATED CIRCUIT

CHIP SUPPORT SUBSTRATE, METHOD FOR SUPPORTING CHIP, THREE-DIMENSIONAL INTEGRATED CIRCUIT, ASSEMBLY DEVICE, AND METHOD FOR MANUFACTURING THREE-DIMENSIONAL INTEGRATED CIRCUIT

外国特許コード F140007874
整理番号 S2012-1221-C0
掲載日 2014年6月18日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2013JP074876
国際公開番号 WO 2014046052
国際出願日 平成25年9月13日(2013.9.13)
国際公開日 平成26年3月27日(2014.3.27)
優先権データ
  • 特願2012-209003 (2012.9.23) JP
発明の名称 (英語) CHIP SUPPORT SUBSTRATE, METHOD FOR SUPPORTING CHIP, THREE-DIMENSIONAL INTEGRATED CIRCUIT, ASSEMBLY DEVICE, AND METHOD FOR MANUFACTURING THREE-DIMENSIONAL INTEGRATED CIRCUIT
発明の概要(英語) The present invention is a chip support substrate provided with a lyophilic region (4) formed on the substrate and holding a chip (3A) using suction, and an electrode (6) formed within the lyophilic region on the substrate, and used for generating electrostatic force on the chip. The present invention is also a method for supporting a chip including: a step for positioning the chip in a lyophilic region of a chip support substrate provided with the lyophilic region, which is formed on the substrate, and an electrode formed within the lyophilic region on the substrate, a fluid (15) being interposed between the chip and the lyophilic region; and a step for generating an electrostatic force on the chip corresponding to the electrode by applying voltage to the electrode.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • TOHOKU UNIVERSITY
  • 発明者(英語)
  • KOYANAGI MITSUMASA
  • TANAKA TETSU
  • FUKUSHIMA TAKAFUMI
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IS JP KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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