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METHOD AND DEVICE FOR MEASURING SCATTERING INTENSITY DISTRIBUTION

外国特許コード F150008056
整理番号 S2013-0150-C0
掲載日 2015年1月8日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2013JP083064
国際公開番号 WO 2014092073
国際出願日 平成25年12月10日(2013.12.10)
国際公開日 平成26年6月19日(2014.6.19)
優先権データ
  • 特願2012-273064 (2012.12.14) JP
発明の名称 (英語) METHOD AND DEVICE FOR MEASURING SCATTERING INTENSITY DISTRIBUTION
発明の概要(英語) The present invention provides a method and a device for measuring a scattering intensity distribution capable of rapidly measuring the scattering intensity distribution in a reciprocal lattice space. An X-ray radiated from an X-ray source (101) is reflected using an X-ray optical element (102) so as to be focused in the vicinity of the surface of a specimen (SA). In a state where a correlation exists between the angles formed by a reference surface and each of a plurality of light paths of monochromatic X-rays focused via the light paths, and angles formed by the normal to the reference surface and a surface including a light path positioned in the center of the light paths, the monochromic X-rays are caused to impinge on the specimen at the same time at the glancing angle (ω), which differs depending on the individual light paths. The scattering intensity of the monochromic X-rays scattered from the specimen is detected using a two-dimensional detector (103). The scattering intensity distribution in the reciprocal lattice space is computed on the basis of the scattering intensity distribution detected by the two-dimensional detector and the correlation.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION
  • 発明者(英語)
  • MATSUSHITA TADASHI
  • VOEGELI WOLFGANG
  • SHIRASAWA TETSURO
  • TAKAHASHI TOSHIO
  • ARAKAWA ETSUO
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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