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SILICON SINGLE CRYSTAL PRODUCTION APPARATUS, AND SILICON SINGLE CRYSTAL PRODUCTION METHOD

外国特許コード F150008226
掲載日 2015年3月26日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2014JP057833
国際公開番号 WO 2014156986
国際出願日 平成26年3月20日(2014.3.20)
国際公開日 平成26年10月2日(2014.10.2)
優先権データ
  • 特願2013-061698 (2013.3.25) JP
発明の名称 (英語) SILICON SINGLE CRYSTAL PRODUCTION APPARATUS, AND SILICON SINGLE CRYSTAL PRODUCTION METHOD
発明の概要(英語) Provided is a silicon single crystal production apparatus, whereby it becomes possible to produce a silicon single crystal having high quality and a large size readily employing a casting method. The apparatus is equipped with: a crucible (3, 4) in which a seed crystal of a silicon single crystal is held on a part of the bottom surface thereof and in which solid and/or liquid silicon is also held; a heat-absorbing section in which heat generated on a region on which the seed crystal of the silicon single crystal is placed in the crucible (3, 4) can be absorbed through the bottom surface of the crucible (3, 4); and a heating section in which a region surrounding the region to be cooled by the heat-absorbing section can be heated with a heat source arranged below the bottom surface of the crucible (3, 4). In the apparatus, the vector (A) of a heat flux generated by the heat-absorbing section and the vector (B) of a heat flux generated by the heating section are controlled while keeping the relationship represented by the formula: A×B
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KYUSHU UNIVERSITY
  • NATIONAL INSTITUTE FOR MATERIALS SCIENCE
  • 発明者(英語)
  • KAKIMOTO KOICHI
  • HARADA HIROFUMI
  • GAO BING
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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