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METALLIC POLISHING PAD AND PRODUCTION METHOD THEREFOR

外国特許コード F150008405
整理番号 S2013-1207-C0
掲載日 2015年7月14日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2014JP066169
国際公開番号 WO 2015008572
国際出願日 平成26年6月18日(2014.6.18)
国際公開日 平成27年1月22日(2015.1.22)
優先権データ
  • 特願2013-150678 (2013.7.19) JP
発明の名称 (英語) METALLIC POLISHING PAD AND PRODUCTION METHOD THEREFOR
発明の概要(英語) Provided is a metallic polishing pad allowing the area coming in contact or in extreme close proximity with a catalyst to be increased on a surface to be processed. A metallic polishing pad (2) for smoothing a surface (6a) to be processed of a workpiece (6) by a catalyst-assisted chemical processing method is constituted from a compression-molded body of metal fibers comprising a transition metal catalyst. Being constituted from metal fibers, the compression-molded body has cavities therein, enabling elastic deformation of metal fibers present on a polishing pad surface (2a). Therefore, when the polishing pad surface (2a) and the surface (6a) to be processed of the workpiece (6) are pressed against each other, the metal fibers deform, adapting to the microscopic asperities present on the surface (6a), thereby reducing the space generated between the polishing pad surface (2a) and the surface (6a) to be processed. In this manner, the area coming in contact or in extreme close proximity with a catalyst can be increased on the surface (6a) to be processed.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NAGOYA INSTITUTE OF TECHNOLOGY
  • SINTOKOGIO, LTD.
  • 発明者(英語)
  • ERYU OSAMU
  • YAMAGUCHI EIJI
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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