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ELECTRODE PAIR, METHOD FOR PRODUCING SAME, SUBSTRATE FOR DEVICE, AND DEVICE

外国特許コード F150008495
掲載日 2015年10月28日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2014JP056081
国際公開番号 WO 2015033600
国際出願日 平成26年3月9日(2014.3.9)
国際公開日 平成27年3月12日(2015.3.12)
優先権データ
  • 特願2013-185650 (2013.9.6) JP
発明の名称 (英語) ELECTRODE PAIR, METHOD FOR PRODUCING SAME, SUBSTRATE FOR DEVICE, AND DEVICE
発明の概要(英語) Provided are an electrode pair which enables the performance of a device to be accurately offered, a method for manufacturing the same, a substrate for a device, and a device. An electrode pair (10), wherein one electrode (10A) and the other electrode (12B) are provided on the same plane so as to face each other with a gap (17) therebetween, and portions facing each other of the one electrode (12A) and the other electrode (12B) are each curved so as to become more distant from the plane as approaching each other. This electrode pair (10) is produced by preparing, as a sample, a substrate on which a pair of seed electrodes are formed with a space therebetween so as to have an initial gap, and, when the sample is immersed in an electroless plating solution, replacing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of replacement. As a result, the surfaces facing each other can be vertically adjusted while the gap between the one electrode (12A) and the other electrode (12B) is kept constant.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • 発明者(英語)
  • MAJIMA YUTAKA
  • TERANISHI TOSHIHARU
  • TAKESHITA SHUHEI
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
参考情報 (研究プロジェクト等) CREST Establishment of Innovative Manufacturing Technology Based on Nanoscience AREA
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