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PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME

外国特許コード F160008639
整理番号 (S2014-0826-N0)
掲載日 2016年1月27日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2015JP061691
国際公開番号 WO 2015159945
国際出願日 平成27年4月16日(2015.4.16)
国際公開日 平成27年10月22日(2015.10.22)
優先権データ
  • 特願2014-085931 (2014.4.17) JP
発明の名称 (英語) PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME
発明の概要(英語) [Problem] To provide a physical/chemical sensor and physical/chemical phenomenon sensing device capable of reducing a reaction time on a movable film and a method for manufacturing the same. [Solution] A physical/chemical sensor forms a Fabry-Perot interferometer, has a flow path formation layer (4) laminated on the surface of a movable film (3), and has formed therein a hollow part (41) and a flow path (42) connected thereto. A physical/chemical phenomenon sensing device is provided with a plurality of physical/chemical sensors, divides the sensors into sensors for detection (100) and sensors for reference (200), and is made to be capable of supplying an analyte and reference sample to a movable film through different flow paths and hollow parts. In a manufacturing method for the physical/chemical sensor and physical/chemical phenomenon sensing device, a sacrificial layer is laminated on a substrate, and in a final step after a resist is used to form the flow path formation layer, the sacrificial layer is etched.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NATIONAL UNIVERSITY CORPORATION TOYOHASHI UNIVERSITY OF TECHNOLOGY
  • 発明者(英語)
  • TAKAHASHI KAZUHIRO
  • SAWADA KAZUAKI
  • OZAWA RYO
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN TD TG
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