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SPECTROMETRY DEVICE AND SPECTROMETRY METHOD

外国特許コード F160008891
整理番号 (S2014-1302-N0)
掲載日 2016年10月25日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP051187
国際公開番号 WO 2016121540
国際出願日 平成28年1月15日(2016.1.15)
国際公開日 平成28年8月4日(2016.8.4)
優先権データ
  • 特願2015-015734 (2015.1.29) JP
発明の名称 (英語) SPECTROMETRY DEVICE AND SPECTROMETRY METHOD
発明の概要(英語) A spectrometry device according to the present invention is provided with: a light source 101 that causes p-polarized light, which is linearly polarized light having an electric field vibration direction parallel to the incidence surface, to be incident on the surface of an object of measurement at Brewster's angle; an introduction optical system 103 for introducing measurement light emitted from the object of measurement struck by the p-polarized light into a phase shifter 105 and dividing the same into two measurement light beams; an interference light optical system 106 for forming interference light from the two measurement light beams; an interference light detection unit 107 for detecting the intensity of the interference light; a processing unit 201 for creating an interferogram of the measurement light on the basis of the intensity variation of the interference light obtained through the driving of the phase shifter 105; and a calculation unit 202 for obtaining a measurement light spectrum by applying the Fourier transform to the measurement light interferogram.
特許請求の範囲(英語) [claim1]
1. A) It was arranged along with the permanent echo section and the said permanent echo section, in the direction which is vertical to the reflecting interface the portable possible movable reflected section and,
b) On the surface of the measuring object, the P polarized light which is the linearly polarized light whose vibrating direction of electric field is parallel with the entrance place the optical lighting expedient which incidence it can point in Brewster angle and,
c) The aforementioned P polarized light the measuring beam which was given out from the aforementioned measuring object which incidence is done the introduction optical system which is introduced into the aforementioned permanent echo section and the aforementioned movable reflected section and,
d) The interference optical system which forms the interference light of the measuring beam where it is introduced by the aforementioned permanent echo section and is introduced by measuring beam and the aforementioned movable reflected section which are reflected and by the said permanent echo section is reflected by the said movable reflected section and,
e) The interference optical sensing station which detects the strength of the aforementioned interference light and,
f) The processing section which calculates the inter- ferro- gram of the aforementioned measuring beam on the basis of the change of strength of the interference light which is detected with the aforementioned interference optical sensing station by making the aforementioned movable reflected section move and,
g) The arithmetic logical unit which calculates the spectrum of the aforementioned measuring beam by Fourier converting the aforementioned inter- ferro- gram
The spectrometry device which features that it has.
[claim2]
2. A) On the surface of the measuring object, the P polarized light which is the linearly polarized light whose vibrating direction of electric field is parallel with the entrance place the optical lighting expedient which incidence it can point in Brewster angle and,
b) The aforementioned P polarized light the measuring beam which was given out from the aforementioned measuring object which incidence is done 1st measuring beam and the divided optical system which is divided into 2nd measuring beam and,
c) The interference optical system which forms the interference light of the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam and,
d) 1st measuring beam and the optical path difference grant expedient which gives continual optical path difference between 2nd measuring beam and,
e) The interference optical sensing station where plural in order to detect the intensity distribution of the aforementioned interference light which corresponds to the aforementioned continual optical path difference have the ancestor/founder and,
f) The processing section which calculates the inter- ferro- gram of the aforementioned measuring beam from intensity distribution of the aforementioned interference light which is detected with the aforementioned interference optical sensing station and,
g) The arithmetic logical unit which calculates the spectrum of the aforementioned measuring beam by Fourier converting the aforementioned inter- ferro- gram
The spectrometry device which features that it has.
[claim3]
3. In claim 1 in the spectrometry device of statement, furthermore,
The surface of the aforementioned measuring object and it was arranged between of the aforementioned introduction optical systems, or aforementioned introduction optical system and the aforementioned permanent echo section and the aforementioned movable reflected section, the spectrometry device which features that it has the polarizing plate which among the aforementioned measuring beams, makes the S polarized light pass where vibrating direction of electric field is vibrating direction and the vertical linearly polarized light of electric field of the aforementioned P polarized light, does not make the aforementioned P polarized light pass.
[claim4]
4. In claim 2 in the spectrometry device of statement, furthermore,
The surface of the aforementioned measuring object and it was arranged between of the aforementioned divided optical systems, or aforementioned divided optical system and the aforementioned optical path difference grant expedient, the spectrometry device which features that it has the polarizing plate which among the aforementioned measuring beams, makes the S polarized light pass where vibrating direction of electric field is vibrating direction and the vertical linearly polarized light of electric field of the aforementioned P polarized light, does not make the aforementioned P polarized light pass.
[claim5]
5. In the spectrometry device of statement, either of the claim 1-4 furthermore,
To the mount aspect and the said mount aspect where the aforementioned measuring object is mounted the spectrometry device which features that it has the plate shaped optical permeable component which possesses the Mituteru plane of fire which is the surface of opposite side.
[claim6]
6. A) Incidence point to the P polarized light which is the linearly polarized light whose vibrating direction of electric field is parallel with the entrance place to the surface of the measuring object, in Brewster angle,
b) The aforementioned P polarized light the measuring beam which was given out from the aforementioned measuring object which incidence is done it was arranged along with the permanent echo section and the said permanent echo section with introduction optical system, it introduces into the portable possible movable reflected section in the direction which is vertical to the reflecting interface,
c) It is introduced by the aforementioned permanent echo section and it is introduced by measuring beam and the aforementioned movable reflected section which are reflected and by the said permanent echo section it forms the interference light of the measuring beam which is reflected by the said movable reflected section making use of interference optical system,
d) Strength of the aforementioned interference light is detected with the interference optical sensing station,
e) On the basis of the change of strength of the interference light which is detected with the aforementioned interference optical sensing station by making the aforementioned movable reflected section move calculating the inter- ferro- gram of the aforementioned measuring beam,
f) The spectrometry method of featuring that the spectrum of the aforementioned measuring beam is calculated by Fourier converting the aforementioned inter- ferro- gram.
[claim7]
7. A) Incidence point to the P polarized light which is the linearly polarized light whose vibrating direction of electric field is parallel with the entrance place to the surface of the measuring object, in Brewster angle,
b) The aforementioned P polarized light the measuring beam which was given out from the aforementioned measuring object which incidence is done 1st measuring beam and is divided into 2nd measuring beam due to divided optical system,
c) After giving continual optical path difference between the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam, interference light of these 1st measuring beams and the aforementioned 2nd measuring beam is formed with interference optical system,
d) It detects intensity distribution of the aforementioned interference light which corresponds to the aforementioned continual optical path difference, with the interference optical sensing station which possesses the plural pixels,
e) From intensity distribution of the aforementioned interference light which is detected with the aforementioned interference optical sensing station calculating the inter- ferro- gram of the aforementioned measuring beam,
f) The spectrometry method of featuring that the spectrum of the aforementioned measuring beam is calculated by Fourier converting the aforementioned inter- ferro- gram.
[claim8]
8. In claim 6 in the spectrometry method of statement,
Among the aforementioned measuring beams, the S polarized light where vibrating direction of electric field is vibrating direction and the vertical linearly polarized light of electric field of the aforementioned P polarized light is made to pass the surface of the aforementioned measuring object and with between of the aforementioned introduction optical systems, or aforementioned introduction optical system and the polarizing plate which is arranged between the aforementioned permanent echo section and the aforementioned movable reflected section, the spectrometry method of featuring that the aforementioned P polarized light is not made to pass.
[claim9]
9. In claim 7 in the spectrometry method of statement,
The spectrometry method of featuring that among the aforementioned measuring beams, electric field electric field of the aforementioned P polarized light makes the S polarized light pass which is the linearly polarized light which crosses the surface of the aforementioned measuring object and with between of the aforementioned divided optical systems, or aforementioned divided optical system and the polarizing plate which is arranged between the aforementioned optical path difference grant expedient, does not make the aforementioned P polarized light pass.
[claim10]
10. Either of the claim 6-9 in the spectrometry method of statement,
To the mount aspect and the said mount aspect where the aforementioned measuring object is mounted having the plate shaped optical permeable component which possesses the Mituteru plane of fire which is the surface of opposite side,
In order on the surface of the aforementioned measuring object the aforementioned P polarized light incidence to do in Brewster angle, the spectrometry method of featuring that the said P polarized light is irradiated to Mituteru plane of fire of the aforementioned optical permeable component.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KAGAWA UNIVERSITY
  • 発明者(英語)
  • ISHIMARU ICHIRO
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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