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SPHERICAL ABERRATION CORRECTION DEVICE FOR CHARGED PARTICLE BEAM ELECTROMAGNETIC LENS コモンズ

外国特許コード F170008932
整理番号 (NU-598)
掲載日 2017年1月19日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP053691
国際公開番号 WO 2016174891
国際出願日 平成28年2月8日(2016.2.8)
国際公開日 平成28年11月3日(2016.11.3)
優先権データ
  • 特願2015-090241 (2015.4.27) JP
発明の名称 (英語) SPHERICAL ABERRATION CORRECTION DEVICE FOR CHARGED PARTICLE BEAM ELECTROMAGNETIC LENS コモンズ
発明の概要(英語) The present invention addresses the problem that an electromagnetic lens for a charged particle beam exerts a positive spherical aberration, and that correcting this spherical aberration requires a complex combination of electromagnetic lenses. In the present invention, one among a circular aperture and an annular aperture is formed in an entry plate disposed on a charged particle beam entry side, the other among the circular aperture and the annular aperture is formed in a plate disposed on the exit side, and a voltage is applied between the entry plate and an exit plate. Then, an electric field formed in the annular aperture exerts divergence whereby the positive spherical aberration is canceled. The present invention allows the spherical aberration to be corrected with an extremely simple and readily achievable structure.
特許請求の範囲(英語) [claim1]
1. It is the device which you use combining with the electromagnetic lens for the charged particle beam, revises the spherical aberration by the aforementioned electromagnetic lens,
The incident plate which is arranged on incident side of the aforementioned charged particle beam and,
We have the ejection plate which is arranged on ejection side of the aforementioned charged particle beam,
One side of the circular open slot and the annular open slot we are formed in the aforementioned incident plate,
Another side of the aforementioned circular open slot and the aforementioned annular open slot is formed in the aforementioned ejection plate,
(1) the center of the aforementioned circular open slot and the aforementioned annular open slot is on the centerline of the aforementioned charged particle beam,
(2) the aforementioned incident plate and the aforementioned ejection plate are orthogonal in the aforementioned centerline,
When (3) diameter of the aforementioned circular open slot is designated as .phi.3, major diameter of the aforementioned annular open slot is designated as .phi.2, inside diameter of the aforementioned annular open slot being designated as .phi.1, it is .phi.3>=.phi.2>.phi.1,
When (4) the aforementioned charged particle is negative charge, when "electric potential of the plate where the annular open slot is formed > it is something related to electric potential of the plate where the circular open slot is formed", the aforementioned charged particle is positive charge, "electric potential of the plate where the annular open slot is formed < it is something related to electric potential of the plate where the circular open slot is formed",
The compensator where the inside component and the outer part component of the annular open slot continue.
[claim2]
2. The compensator of the claim 1 which features that the plate of sample side is grounded.
[claim3]
3. The claim the compensator of 1 which features that the aforementioned annular open slot is formed to the plate of sample side or 2.
[claim4]
4. The aforementioned incident plate sticks to the aspect of one side of the insulated seat, in no 1 sections of the claim 1-3 which features that the open slot which the aforementioned ejection plate is adhesive to the other aspect of the aforementioned insulated seat, in the aforementioned insulated seat the aforementioned circular open slot includes is formed the compensator of statement.
[claim5]
5. The aforementioned incident plate and the aforementioned insulated seat and the aforementioned ejection plate, in the claim 4 which features that it is accommodated inside the insulated tube the compensator of statement.
[claim6]
6. The bridge which connects outside and inside the aforementioned annular open slot to the plate where the aforementioned annular open slot is formed is formed, outside the description above and in no 1 sections of the claim 1-5 which features that the aforementioned bridge and inside the description above just become the thing the compensator of statement.
[claim7]
7. The incident side end face of the aforementioned bridge, from the incident side end face of the aforementioned plate which forms inside outside and the description above the description above, in the claim 6 which features that it has shifted on ejection side the compensator of statement.
[claim8]
8. In no 1 sections of the claim 1-7 which features that the perforation hole is formed to the center of the inside disk of the annular open slot the compensator of statement.
[claim9]
9. In no 1 sections of the claim 1-8 the compensator of statement, the compensator which features that it is locked to the component which is removed and re-installed vis-a-vis the perforation hole which is formed to the tube which the aforementioned charged particle beam passes.
[claim10]
10. The removal and re-installation possible aforementioned component, at plural positions is fixing possible in the aforementioned tube vis-a-vis the aforementioned perforation hole,
Corresponding to the aforementioned plural positions, in the claim 9 which features that plural of the compensators of statement are locked to the aforementioned component in each 1 sections of the claim 1-8 the compensator of statement.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NAGOYA UNIVERSITY
  • 発明者(英語)
  • KAWASAKI TADAHIRO
  • TANJI TAKAYOSHI
  • IKUTA TAKASHI
国際特許分類(IPC)
指定国 (WO2016174891)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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