TOP > 外国特許検索 > MEASURING DEVICE

MEASURING DEVICE

外国特許コード F170008952
整理番号 (S2015-1644-N0)
掲載日 2017年2月16日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP066636
国際公開番号 WO 2017002535
国際出願日 平成28年6月3日(2016.6.3)
国際公開日 平成29年1月5日(2017.1.5)
優先権データ
  • 特願2015-130249 (2015.6.29) JP
発明の名称 (英語) MEASURING DEVICE
発明の概要(英語) The present invention is provided with a point light source (12) for emitting discrete-spectrum light (LA) including two or more spectra distributed at mutually different frequencies, a scattering part (14) for scattering the discrete-spectrum light in mutually different directions for each spectrum, a first light condensing part (15) for condensing spectra at mutually different positions (p1, . . ., pn) of a sample (S), a superimposing part (19) for spatially superimposing each spectrum transmitted or reflected from mutually different positions of the sample, a spatial filtering optical system (18) for condensing discrete-spectrum light (LB) including information of the sample on a position (P3) conjugate with the condensation position on the sample of the spectrum scattered by the scattering part and performing spatial filtering, and a detection part (20) for acquiring a modal decomposition spectrum including the information of the sample from the discrete-spectrum light including the information of the sample.
特許請求の範囲(英語) [claim1]
1. The point light source which gives out the discrete spectrum light which the spectrum which it has been distributed at the frequency which differs mutually two or more is included and,
The aforementioned discrete spectrum light which was given out from the aforementioned point light source the dispersed section which is made to disperse to the direction which differs to every aforementioned spectrum mutually and,
The aforementioned spectrum which is dispersed by the aforementioned dispersed section the light condensing section which it condenses to the position where the sample differs mutually respectively and,
The aforementioned spectrum which condenses by the aforementioned light condensing section, the superposition section which superposes the respective spectrum which from the position where the aforementioned sample differs mutually it transmits or reflects, or spatially and,
The discrete spectrum light which includes the information of the aforementioned sample which you pile up with the aforementioned superposition section and can be brought together, light condensing position and conjugation on the aforementioned sample of the aforementioned spectrum which is dispersed by the aforementioned dispersed section condensing to position, spatial filtering the spatial filtering optical system which is done and,
With the aforementioned spatial filtering optical system spatial filtering from the discrete spectrum light which includes the information of the aforementioned sample which is done, the sensing station which acquires the mode disassembly spectrum which includes the information of the aforementioned sample and,
The measuring device which features that it has.
[claim2]
2. As for the aforementioned point light source, in the claim 1 which features that it is the first COM illuminant which gives out the first optical frequency COM spectrum where the first contiguity frequency interval which is interval of frequency of the aforementioned spectrum where position of frequency is adjacent with the frequency axis as the aforementioned discrete spectrum light, agrees mutually the measuring device of statement.
[claim3]
3. Interval of frequency of the aforementioned spectrum where position of frequency is adjacent with the aforementioned frequency axis the aforementioned first contiguity frequency interval is the second contiguity frequency interval which differs, having the second COM illuminant which gives out the second optical frequency COM spectrum where at the same time the aforementioned second contiguity frequency interval agrees mutually,
As for the aforementioned sensing station, interfering with the aforementioned first optical frequency COM spectrum and the aforementioned second optical frequency COM spectrum, in the claim 2 which features that you acquire the aforementioned mode disassembly spectrum on the basis of the interference spectrum which it occurs the measuring device of statement.
[claim4]
4. As for the aforementioned dispersed section, incidence having the dispersive device which the light which is done wave length is dispersed,
The aforementioned discrete spectrum light which was given out from the aforementioned point light source wave length is made to disperse to the direction which differs to every aforementioned spectrum depending upon the aforementioned dispersive device,
As for the aforementioned superposition section, from the claim 1 which features that the spectrum which includes the information of the aforementioned sample which transmitted the aforementioned sample is superposed spatially either of claim 3 in one section the measuring device of statement.
[claim5]
5. The aforementioned dispersed section and the aforementioned superposition section share one dispersive device which the light which incidence is done wave length is dispersed,
From the claim 1 which features that the spectrum which includes the information of the aforementioned sample which makes the aforementioned discrete spectrum light which was given out from the aforementioned point light source the direction disperse which differs to every aforementioned spectrum, depending upon the dispersive device of the aforementioned one at the same time reflects from the aforementioned sample is superposed spatially either of claim 3 in one section the measuring device of statement.
[claim6]
6. As for the aforementioned dispersive device,
The aforementioned discrete spectrum light in the first direction which differs to every aforementioned spectrum wave length the first dispersive device which is made to disperse and,
With the aforementioned first dispersive device wave length in the second direction which crosses the aforementioned discrete spectrum light which is dispersed in the aforementioned first direction wave length the second dispersive device which is made to disperse and, in the claim 4 which features that it has the measuring device of statement.
[claim7]
7. As for the aforementioned dispersive device, the claim 3 which features that it consists the diffraction grating or in claim 4 the measuring device of statement.
[claim8]
8. Central wave length of the aforementioned discrete spectrum light, the description above interval of frequency of the spectrum which is adjacent, dispersed efficiency of the aforementioned dispersed section, in order numerical aperture of the lens which is used for the aforementioned light condensing section and interval of frequency of the aforementioned spectrum where the aforementioned discrete spectrum light is adjacent for central interval of spot of the aforementioned spectrum which it condenses to the position where the aforementioned sample differs mutually respectively, depending upon the aforementioned light condensing section respectively to be above diameter of spot of the aforementioned spectrum, from the claim 1 which features that it is set either of claim 7 in one section the measuring device of statement.
[claim9]
9. In order central wave length of the aforementioned discrete spectrum light, the description above interval of frequency of the spectrum which is adjacent, spot of the aforementioned spectrum which it condenses to the numerical aperture of the lens which is arranged with the aforementioned sample and the aforementioned superposition section and the position where resolution of the aforementioned superposition section differs respectively, the aforementioned sample mutually respectively to pile up spatially at specified position of the aforementioned superposition section with the aforementioned lens and to can be brought together in the claim 8 which features that it is set the measuring device of statement.
[claim10]
10. Condensing the plural aforementioned spectra of the aforementioned discrete spectrum light to the position where the aforementioned sample differs mutually respectively, 2 dimensional spot group which becomes, from the claim 1 which features that it has the spectrum spot duplication section which 2 dimensional spot group where the center of the respective spot is arranged in the position where it is far being the size which is smaller than interval of the aforementioned spot which is adjacent from the center of the plural spots which form the said 2 dimensional spot group plural is formed either of claim 9 in one section the measuring device of statement.
[claim11]
11. From the claim 1 which features that it has the [dekonboriyujiyon] processing section which administers [dekonboriyujiyon] processing vis-a-vis 2 dimensional spot group of the aforementioned spectrum which it condenses to the position where the aforementioned sample differs mutually respectively either of claim 10 in one section the measuring device of statement.
[claim12]
12. Phase of the aforementioned first optical frequency COM spectrum having the third COM illuminant which gives out the third optical frequency COM spectrum which differs,
As for the aforementioned sensing station, interfering with the aforementioned first optical frequency COM spectrum and the aforementioned third optical frequency COM spectrum, from the claim 1 which features that you acquire the mode disassembly phase spectrum on the basis of the phase difference which can either of claim 11 in one section the measuring device of statement.
[claim13]
13. Interval of frequency of the aforementioned spectrum of the aforementioned third optical frequency COM spectrum the aforementioned first contiguity frequency interval is the second contiguity frequency interval which differs, at the same time the aforementioned second contiguity frequency interval agrees mutually,
As for the aforementioned sensing station, interfering with the aforementioned first optical frequency COM spectrum and the aforementioned third optical frequency COM spectrum, in the claim 12 which features that you acquire the aforementioned mode disassembly phase spectrum on the basis of the interference spectrum which it occurs the measuring device of statement.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • TOKUSHIMA UNIVERSITY
  • UTSUNOMIYA UNIVERSITY
  • 発明者(英語)
  • YASUI TAKESHI
  • IWATA TETSUO
  • MIZUTANI YASUHIRO
  • MINAMIKAWA TAKEO
  • HSIEH YI-DA
  • HASE EIJI
  • YAMAMOTO HIROTSUGU
国際特許分類(IPC)
指定国 (WO201702535)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
ご興味のある方は、下記「問合せ先」へ電子メールまたはFAXでご連絡ください。

PAGE TOP

close
close
close
close
close
close