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OBSERVATION SYSTEM 新技術説明会

外国特許コード F170009010
整理番号 (S2015-1988-N50)
掲載日 2017年3月29日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP074265
国際公開番号 WO 2017030194
国際出願日 平成28年8月19日(2016.8.19)
国際公開日 平成29年2月23日(2017.2.23)
優先権データ
  • 特願2015-161758 (2015.8.19) JP
発明の名称 (英語) OBSERVATION SYSTEM 新技術説明会
発明の概要(英語) The purpose of the present invention is to provide an inexpensive system whereby a correct high-resolution image can be stably obtained even when a disturbance occurs. The present invention is provided with a light source 2 having a coherence length in a predetermined range, first and second light paths 3, 4 leading first and second lights from the light source 2 to an observation object S, an interference fringe generating part 6 for generating a first interference fringe resulting from the first and second lights, a measurement part 12 for measuring the light intensity distribution of a second interference fringe resulting from first and second reflected lights reflected by the observation object S in the first and second lights, and a computation part 13 for calculating an amount of phase shift in the first interference fringe on the basis of an amount of displacement of the light intensity distribution of the second interference fringe.
特許請求の範囲(英語) [claim1]
1. The illuminant which possesses the coherent length of the specified range and,
The 1st light which is portion of the light which possesses 1st optical path, is given out from the aforementioned illuminant the 1st optical path which is led from the aforementioned illuminant to observation object ones and,
It possesses 2nd optical path, the 2nd light which is the remainder of aforementioned light the 2nd optical path which from the aforementioned illuminant is led to aforementioned observation object ones and,
Interfering the aforementioned 1st light and the aforementioned 2nd light, the interference fringes formation department which makes the 1st interference fringes form on aforementioned observation object ones and,
The test section which measures the optical intensity distribution of the 2nd interference fringes which are formed by the interference of the 2nd reflected light which is reflected by aforementioned observation object ones inside 1st reflected light and the aforementioned 2nd light which are reflected by aforementioned observation object ones among the aforementioned 1st lights and,
The arithmetic logical unit which is connected to the aforementioned test section and,
Having,
As for the aforementioned arithmetic logical unit,
The shift quantity of the phase in the aforementioned 1st interference fringes on the basis of the displacement quantity of the aforementioned optical intensity distribution in the aforementioned 2nd interference fringes is calculated,
Observation system.
[claim2]
2. The 1st optical path adjustment section which expands and contracts the aforementioned 1st optical path or the aforementioned 2nd optical path and,
The image pickup section which image distribution of the light which disperses by aforementioned observation object ones inside the aforementioned 1st light and the aforementioned 2nd light which display the aforementioned 1st interference fringes image pickup is done and,
The 3rd optical path which possesses 3rd optical path, leads the aforementioned 1st reflected light and,
The 4th optical path which possesses 4th optical path, leads the aforementioned 2nd reflected light and, furthermore having,
Providing to terminal of the aforementioned 3rd optical path and the aforementioned 4th optical path the aforementioned test section,
The aforementioned arithmetic logical unit is connected by also the aforementioned image pickup section, calculates the form distribution of aforementioned observation object ones the aforementioned image distribution which corresponds to aforementioned 1st interference fringes which possess the aforementioned phase and the particular phase which respond to the aforementioned shift quantity and, of on the basis,
Observation system of claim 1 statement.
[claim3]
3. As for the aforementioned arithmetic logical unit,
Form distribution of aforementioned observation object ones is calculated at least three which at least corresponds to three which at least possesses three which differs mutually aforementioned phases and these aforementioned phases respectively aforementioned 1st interference fringes aforementioned image distribution and, of on the basis,
Observation system of claim 2 statement.
[claim4]
4. The aforementioned test section until the aforementioned shift quantity which at least corresponds to three which differs mutually aforementioned phases it is calculated by the aforementioned arithmetic logical unit, continues the measurement of the aforementioned optical intensity distribution, the observation system of claim 3 statement.
[claim5]
5. As for the aforementioned interference fringes formation department,
The 1st projection section which is provided in the terminal of the aforementioned 1st optical path, projects the aforementioned 1st light to on aforementioned observation object ones and,
The 1st light absorbent section where it is provided in the beginning of the aforementioned 3rd optical path, through aforementioned observation object ones, is arranged in the position where it opposes with the aforementioned 1st projection section, the aforementioned 1st reflected light absorbs light and,
The 2nd projection section which is provided in the terminal of the aforementioned 2nd optical path, projects the aforementioned 2nd light to on aforementioned observation object ones and,
The 2nd light absorbent section where it is provided in the beginning of the aforementioned 4th optical path, through aforementioned observation object ones, is arranged in the position where it opposes with the aforementioned 2nd projection section, the aforementioned 2nd reflected light absorbs light and,
It possesses,
Either of claim 2-4 observation system of one section statement.
[claim6]
6. You abbreviate cross from the aforementioned 1st projection section to the aforementioned 1st light absorbent section from 1st direction and the aforementioned 2nd projection section which the aforementioned 1st light advances the 2nd direction which the aforementioned 2nd light advances and, the plane surface for aforementioned observation object ones apparent in to the aforementioned 2nd light absorbent section,
Observation system of claim 5 statement.
[claim7]
7. Furthermore it has the 2nd optical path adjustment section which expands and contracts the aforementioned 3rd optical path or the aforementioned 4th optical path,
Either of claim 2-6 observation system of one section statement.
[claim8]
8. Coherent length of the aforementioned specified range is shorter than coherent length of the laser illuminant,
Either of claim 1-7 observation system of one section statement.
[claim9]
9. Coherent length of the aforementioned specified range is 100 .micro.m or less of 1 .micro.m or more,
Either of claim 1-8 observation system of one section statement.
[claim10]
10. The aforementioned illuminant is the SLD illuminant or the LED illuminant,
Either of claim 1-9 observation system of one section statement.
[claim11]
11. The aforementioned test section is the line sensor,
Either of claim 1-10 observation system of one section statement.
[claim12]
12. From aforementioned observation object ones furthermore it has the rotary stand which revolution possibly keeps aforementioned observation object ones to the aforementioned image pickup section around the axis which faces, either of the claim 2-7 the observation system of one section statement.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • SHIZUOKA UNIVERSITY
  • 発明者(英語)
  • USUKI SHIN
  • TAKADA TOMOHIRO
国際特許分類(IPC)
指定国 (WO201730194)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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