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ELECTROSTATIC LENS, AND PARALLEL BEAM GENERATION DEVICE AND PARALLEL BEAM CONVERGENCE DEVICE WHICH USE ELECTROSTATIC LENS AND COLLIMATOR

外国特許コード F170009014
整理番号 (S2015-1683-N0)
掲載日 2017年3月29日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP070744
国際公開番号 WO 2017010529
国際出願日 平成28年7月13日(2016.7.13)
国際公開日 平成29年1月19日(2017.1.19)
優先権データ
  • 特願2015-141687 (2015.7.15) JP
発明の名称 (英語) ELECTROSTATIC LENS, AND PARALLEL BEAM GENERATION DEVICE AND PARALLEL BEAM CONVERGENCE DEVICE WHICH USE ELECTROSTATIC LENS AND COLLIMATOR
発明の概要(英語) Provided is a compact device which captures, over a wide solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (10-14) and an axisymmetric aspherical mesh (2) which has a surface that is concave away from the point source; and a flat collimator plate (3) positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source (7) is ±30º or greater. The shape of the aspherical mesh (2), and the potentials and the positions of a ground electrode (10) and application electrodes (11-15) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis so that after the trajectories of the electrically charged particles have been substantially parallelized with respect to the axis, the charged particles enter the flat collimator plate (3) at an angle of incidence substantially perpendicular thereto.
特許請求の範囲(英語) [claim1]
1. The axial symmetry which possesses concave condition vis-a-vis the point source or light condensing point or substantially the axial symmetrical aspheric surface mesh and the axial symmetry or substantial the axis symmetry single unit or, being the electrostatic lens which consists of the plural electrodes,
The aforementioned aspheric surface mesh, the spheroid which designates to mesh central position as the extended shaft from the central vicinity of the mesh open part, or, is the substantial spheroid of the form where the mesh open part vicinity inside spreads with convex curvature,
Open part radius of the mesh electrode which is connected to the mesh and, the aforementioned single unit or among the plural electrodes, ratio of open part radius of the first electrode which it adjoins to the aforementioned mesh electrode, it is the 1.6 or less of 1.2 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid to be larger than 1.0 is 2.0 or less,
Taking in angle of the charged particle which occurs from the point source with the 60.deg., locus of the charged particle the electrostatic lens which features that gap angle from the optical axis converts parallel below the 1.deg..
[claim2]
2. In the claim 1 which features that the number of electrodes makes excludes the aforementioned mesh electrode, as for reduction gear ratio with the terminal electrode for the kinetic energy when occurring of the charged particle as a ratio of kinetic energy, description below 1) the -5) fills up each of them the electrostatic lens of statement:
1) When the number of electrodes with 1, reduction gear ratio is the 0.3 or less of 0.1 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid is the 1.89 or less of 1.69 or more,
2) When the number of electrodes with 2, reduction gear ratio is the 0.3 or less of 0.1 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid is the 1.76 or less of 1.56 or more,
3) When the number of electrodes with 3, reduction gear ratio is the 0.3 or less of 0.1 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid is the 1.72 or less of 1.52 or more,
4) When the number of electrodes with 4, reduction gear ratio is the 0.3 or less of 0.1 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid is the 1.69 or less of 1.49 or more,
5) The number of electrodes 5 or more, when reduction gear ratio is the 0.3 or less of 0.1 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid is the 1.59 or less of 1.39 or more.
[claim3]
3. When the aforementioned reduction gear ratio is under the 0.1 of 0.01 or more,
Ratio with the extended shaft radius and the minor axis radius in the aforementioned spheroid to be larger than 1.0 in the claim 2 which features that it is under 1.5 the electrostatic lens of statement.
[claim4]
4. As for mesh form of the aforementioned substantial spheroid,
In comparison with the form of the spheroid of the same extended shaft radius and minor axis radius, the gap of radial from the extended shaft is 5% or less of radius distance,
In the position where the angle which the axis and the extended shaft which tie with the point source and the mesh shaped surface form is larger than the 40.deg., the gap of the above-mentioned radial the first floor is differentiated concerning angle and the inflection point of those which are plotted exists,
In the claim 1 which features thing the electrostatic lens of statement.
[claim5]
5. Aforementioned substantial spheroid as for, the claim mesh form of 1 which features that it is displayed by dmesh which is displayed with the below-mentioned numerical formula which is polynomial function or in 4 the electrostatic lens of statement:
(In type 1, as for dmesh from the point source distance and distance d to mesh surface position [as for 1] from the point source distance and distance d to mesh advanced position on the optical axis [as for 2] distance to edge position of the mesh, angle I as for .theta.max the respective mesh surface and gap angle from the optical axis in order to decide the edge position of the mesh, as for I function of angle I , as for n at the number of dimensions of function, as for w it is decided from the point source parameter a [1] -a [by n].).
[claim6]
6. From each electrostatic lens and the aforementioned electrostatic lens of the claim 1-5 and the plane surface collimator plate which is arranged in the same axis it is constituted,
In order taking in angle of the charged particle which occurs from the point source with the 60.deg., locus of the charged particle after gap angle from the optical axis converts parallel below the 1.deg., the charged particle abbreviation vertically incidence to do vis-a-vis the plane surface collimator plate, the collimated beam supply system which features that the aforementioned electrostatic lens and the aforementioned plane surface collimator plate are arranged in the co-axis.
[claim7]
7. The aforementioned plane surface collimator plate, as the band pass filter which sorts only the charged particle of kinetic energy of specification functioning in the claim 6 which features that it does the collimated beam supply system of statement.
[claim8]
8. In the claim 7 which features that the charged particle of kinetic energy of the specification where furthermore it can provide the plane surface micro channel plate which bundles the minute photomultiplier flatly, from the aforementioned plane surface collimator plate radiation it does with avalanche electric current is expanded the collimated beam supply system of statement.
[claim9]
9. As for the aforementioned plane surface collimator plate, aspect ratio (ratio of diameter and hole length) the 1:5 or in either of the claim 6-8 which features that it can provide the pore where it is the 1:20 with numerical aperture 50% or more the collimated beam supply system of statement.
[claim10]
10. The sweep expedient which sweeps the electric potential of the aforementioned electrode and the aforementioned plane surface collimator plate furthermore in either of the claim 6-9 which features that it is provided the collimated beam supply system of statement.
[claim11]
11. Features that in the collimated beam supply system of statement, furthermore it can provide the phosphor screen and camera expedient, from the aforementioned plane surface collimator plate it converts angular distribution of the charged particle of kinetic energy of the specification which radiation is done, to luminescent point on the aforementioned phosphor screen and the picture it measures with the aforementioned camera expedient the angular distribution measurement analytical instrument which either of the claim 6-10.
[claim12]
12. Changing the direct current voltage which is impressed in the grid, in the claim 11 which features that the charged particle of kinetic energy of the specification where lockin is detected the plane surface obstruction electric potential grid which furthermore can provide the change of the electric current by the charged particle which passes the grid from the aforementioned plane surface collimator plate radiation does is detected the angular distribution measurement analytical instrument of statement.
[claim13]
13. In the claim 11 which features that the delay line detector (delay line detector) furthermore is provided, from the aforementioned collimator plate measures the coming out elevation direction and arrival time of the individual charged particle of kinetic energy of the specification which radiation is done, individually with the aforementioned delay line detector and the time disassembly picture measures the angular distribution measurement analytical instrument of statement.
[claim14]
14. The device which is selected from the group of the electronic spectrum device, the electron diffraction device, the photoelectron spectrum device, the photoelectron diffractometer, the positron spectrum device, the positron diffractometer, the ion disconnection angular distribution measurement equipment, the crystalline structure analytical instrument, the material surface analytical instrument, and the solid physical properties analytical instrument where the angular distribution measurement analytical instrument of each charged particle energy of the claim 11-13 is installed.
[claim15]
15. No collimated beam supply system of the claim 6-10, the precise ion etching device which does ion etching or the ion sputtering which are installed as large aperture parallel ion beam source of single energy.
[claim16]
16. In the angular distribution measurement analytical instrument of claim 11, the aforementioned plane surface collimator plate the wide solid angle X-ray detector which features that the electron which negative electric potential, designates the aforementioned phosphor screen as correct electric potential, occurs with the aforementioned plane surface collimator plate is expanded.
[claim17]
17. From each electrostatic lens and the aforementioned electrostatic lens of the claim 1-5 and the plane surface collimator plate which is arranged in the same axis it is constituted,
Vis-a-vis the aforementioned plane surface collimator plate in order abbreviation vertically locus after the radiation of the kinetic energy charged particle of the specification which incidence is done, to condense in the aforementioned light condensing point with the aforementioned electrostatic lens, the collimated beam focusing arrangement which features that the aforementioned electrostatic lens and the aforementioned plane surface collimator plate are arranged in the co-axis.
[claim18]
18. As for the aforementioned plane surface collimator plate, aspect ratio (ratio of diameter and hole length) the 1:5 or in the claim 17 which features that it can provide the pore where it is the 1:20 with numerical aperture 50% or more the collimated beam focusing arrangement of statement.
[claim19]
19. Claim the collimated beam focusing arrangement of 17 or 18 is arranged plural, the charged particles style direction energy measuring device where the aforementioned plane surface collimator plate, function does as the band pass filter which sorts only the charged particle of kinetic energy of specification, removes the charged particles style of specific direction due to the aforementioned plane surface collimator plate, condenses just the particle of energy of specification to point with the aforementioned electrostatic lens and measures energy strength.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NARA INSTITUTE OF SCIENCE AND TECHNOLOGY
  • 発明者(英語)
  • MATSUI FUMIHIKO
  • MATSUDA HIROYUKI
国際特許分類(IPC)
指定国 (WO201710529)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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