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SPECTROSCOPE NEW

外国特許コード F170009030
整理番号 (S2015-1758-N0)
掲載日 2017年4月11日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP070287
国際公開番号 WO 2017007024
国際出願日 平成28年7月8日(2016.7.8)
国際公開日 平成29年1月12日(2017.1.12)
優先権データ
  • JP2015137321 (2015.7.8) 15
発明の名称 (英語) SPECTROSCOPE NEW
発明の概要(英語) This spectroscope (1) is composed of a conjugate-plane-imaging optical system and a one-shot optical system. In a conjugate-plane-imaging optical system, the image of an object (object surface) to be measured forms an optically conjugate plane with an object surface using an imaging lens or wide-angle lens, and a micro objective lens or other lens (11) that corresponds to a magnification and a visual range which are observation conditions. The conjugate plane is the object surface of a one-shot optical system, and a multiple slit (13) is disposed in the conjugate plane. The multiple slit (13) has a plurality of apertures arranged in periodic fashion in a predetermined direction. The one-shot optical system is an infinity-corrected imaging optical system brought about by an objective lens (15) and an imaging lens (17), and has a phase shifter (19) disposed in the vicinity of a Fourier transform plane, a 2D light-receiving array device (21) disposed in the imaging plane of the imaging lens (17), and a plano-concave cylindrical lens (23) disposed between the multiple slits (13) and the objective lens (15).
特許請求の範囲(英語) [claim1]
1. A) Dividing the measuring beam which respectively was given out from the plural points of measurement which are located inside the measurement territory of suffering measurement ones into two in specified 1st axial direction, 1st measuring beam and the divided optical system which forms 2nd measuring beam and,
b) Between the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam, the optical path difference grant expedient which grants the optical path difference which changes continually the aforementioned 1st axial direction according to the 2nd axial direction which is the direction which crosses and,
c) Condensing the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam where the optical path difference which changes continually is granted to the aforementioned 1st axial direction, the image formation optical system which forms the interference light of rectilinear condition on the image formation aspect and,
d) The interference optical sensing station which possesses the plural pixels which on aforementioned image formation aspect in aforementioned 2nd axial direction are arranged at specified period, detects the strength of the aforementioned interference light and,
e) The processing section which calculates the inter- ferro- gram of point of measurement of aforementioned suffering measurement ones on the basis of the optical strength of the aforementioned interference light which is detected with the aforementioned interference optical sensing station, acquires the spectrum by Fourier converting this inter- ferro- gram and,
f) It was arranged between aforementioned suffering measurement ones and the aforementioned divided optical system, as it possesses the conjugate aspect which is common with the said divided optical system, on said conjugate aspect the conjugate surface image formation optical system which measuring beam from aforementioned point of measurement image formation is done and,
g) The amplitude type diffraction grating which possesses the being transparent optical section and the shade section which were arranged on the aforementioned conjugate aspect, line up into the aforementioned 1st axial direction periodically and,
h) After the aforementioned measuring beam passes the aforementioned amplitude type diffraction grating, the spread optical system which spreads light to the aforementioned 2nd axial direction
The spectrometry device which features that it has.
[claim2]
2. The aforementioned spread optical system, in the claim 1 which features that it is constituted from the flat concave cylindrical lens the spectrometry device of statement.
[claim3]
3. The aforementioned spread optical system, in the claim 1 which features that it is constituted from the convex cylindrical lens of 1 sets the spectrometry device of statement.
[claim4]
4. A) Dividing the measuring beam which respectively was given out from the plural points of measurement which are located inside the measurement territory of suffering measurement ones into two in specified 1st axial direction, 1st measuring beam and the divided optical system which forms 2nd measuring beam and,
b) Between the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam, the optical path difference grant expedient which grants the optical path difference which changes continually the aforementioned 1st axial direction according to the 2nd axial direction which is the direction which crosses and,
c) Condensing the aforementioned 1st measuring beam and the aforementioned 2nd measuring beam where the optical path difference which changes continually is granted to the aforementioned 1st axial direction, the image formation optical system which forms the interference light of rectilinear condition on the image formation aspect and,
d) The interference optical sensing station which possesses the plural pixels which on aforementioned image formation aspect in aforementioned 2nd axial direction are arranged at specified period, detects the strength of the aforementioned interference light and,
e) The processing section which calculates the inter- ferro- gram of point of measurement of aforementioned suffering measurement ones on the basis of the optical strength of the aforementioned interference light which is detected with the aforementioned interference optical sensing station, acquires the spectrum by Fourier converting this inter- ferro- gram and,
f) It was arranged between aforementioned suffering measurement ones and the aforementioned divided optical system, as it possesses the conjugate aspect which is common with the said divided optical system, on said conjugate aspect the conjugate surface image formation optical system which measuring beam from aforementioned point of measurement image formation is done and,
g) The being transparent optical section and the shade section possesses the amplitude type diffraction grating which were arranged on the aforementioned conjugate aspect, line up into the aforementioned 1st axial direction periodically having,
The aforementioned interference photodetector, the pixel line which consists of m pixels which in the aforementioned 2nd axial direction are arranged at specified period n mxn which is arranged has the pixel for 1st axial direction, in order position of the pixel which forms each pixel line, position of the pixel which forms the pixel line which it adjoins to slip, we are arranged alternately,
In order the aforementioned image formation optical system, 1st measuring beam and interference light of 2nd measuring beam, to ride in the plural pixel lines of the aforementioned interference photodetector, the spectrometry device which features that it forms.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KAGAWA UNIVERSITY
  • 発明者(英語)
  • ISHIMARU ICHIRO
国際特許分類(IPC)
指定国 (WO201707024)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KN KP KR KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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