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PROCESSING METHOD AND PROCESSING APPARATUS NEW

外国特許コード F170009163
整理番号 (S2016-0440-N0)
掲載日 2017年9月6日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP005372
国際公開番号 WO 2017141918
国際出願日 平成29年2月14日(2017.2.14)
国際公開日 平成29年8月24日(2017.8.24)
優先権データ
  • 特願2016-027126 (2016.2.16) JP
  • 特願2016-028408 (2016.2.17) JP
発明の名称 (英語) PROCESSING METHOD AND PROCESSING APPARATUS NEW
発明の概要(英語) [Problem] To provide a processing method and a processing apparatus capable of realizing high-efficiency, high-precision processing with a simple configuration, using dry polishing for processing diamonds, etc. [Solution] A processing apparatus 1 has a sapphire surface plate 2, and a specimen holder 4 for holding a single-crystal diamond 3. The processing apparatus 1 also has an ozone supply unit 5 for supplying ozone gas to the contact site of the sapphire surface plate 2 and the single-crystal diamond 3.
特許請求の範囲(英語) [claim1]
1. -metal oxide with constitute do process component suffer process thing with contact do, contact region to ozone gas supply do as, description above process component description above suffer process thing to contact do state with displace do process have
Process method.
[claim2]
2. -description above contact region with occur rub heat with ozone gas disassembly do
In claim 1 process method of statement.
[claim3]
3. The aforementioned processed component, Al [2] O [the sapphire of a monocrystal state where it is formed from 3], the corundum and the sapphire glass, the sapphire crystal and the alumina of polycrystal states, the alumina ceramics, SiO [the inside either of the glass which designates 2] as the main component consists of one,
The aforementioned work piece, the diamond, the polycrystal diamonds and the CVD diamond, the inside either of the DLC membranes consists of one
Claim 1 or in claim 2 process method of statement.
[claim4]
4. The aforementioned processed component SiO [consists of the glass which designates 2] as the main component,
The aforementioned work piece consists of SiC
Claim 1 or in claim 2 process method of statement.
[claim5]
5. The aforementioned processed component, or the aforementioned work piece one side it humidifies at least
Claim 1 or in claim 4 process method of statement.
[claim6]
6. The aforementioned ozone gas contains the alkaline solution
Claim 1 or in claim 5 process method of statement.
[claim7]
7. The aforementioned alkaline solution is the alkaline electrolytic water
In claim 6 process method of statement.
[claim8]
8. At least on the one hand, the cation, or the anion of the aforementioned processed component, or the aforementioned work piece supplying one side at least, it controls the electrification quantity
Claim 1 or in claim 7 process method of statement.
[claim9]
9. N [2] supplying the gas to the contact region of the aforementioned processed component and the aforementioned work piece, it controls the electrification quantity
Claim 1 or in claim 8 process method of statement.
[claim10]
10. -metal oxide with constitute do process component suffer process thing with contact do, contact region to ozone gas supply do as, description above process component description above suffer process thing to contact do state with displace do process have,
The aforementioned processed component alumina ceramics or SiO [the inside either of the glass which designates 2] as the main component consists of one,
The aforementioned work piece consists of GaN
Process method.
[claim11]
11. The aforementioned ozone gas contains the alkaline electrolytic water
In claim 10 process method of statement.
[claim12]
12. -metal oxide with constitute do process component and,
Making the specified work piece contact with the aforementioned processed component, the retention mechanism which you keep and,
The aforementioned processed component and the ozone gas supply section which supplies the ozone gas to the contact region of the aforementioned work piece and,
The aforementioned processed component and when the aforementioned work piece is made to contact, it has with the drive section which makes the aforementioned processed component displace
Processed device.
[claim13]
13. Frictional heat occurs with the aforementioned contact region with the aforementioned processed component and the aforementioned work piece
In claim 12 processed device of statement.
[claim14]
14. The aforementioned processed component, Al [2] O [the sapphire of a monocrystal state where it is formed from 3], the corundum and the sapphire glass, the sapphire crystal and the alumina of polycrystal states, alumina ceramics SiO [the inside either of the glass which designates 2] as the main component consists of one,
The aforementioned work piece, the diamond, the polycrystal diamonds and the CVD diamond, the inside either of the DLC membranes consists of one
Claim 12 or in claim 13 processed device of statement.
[claim15]
15. The aforementioned processed component SiO [consists of the glass which designates 2] as the main component,
The aforementioned work piece consists of SiC
Claim 12 or in claim 13 processed device of statement.
[claim16]
16. The aforementioned processed component, or the aforementioned work piece it has the humidification processing section which humidifies
Claim 12 or in claim 15 processed device of statement.
[claim17]
17. The aforementioned ozone gas contains the alkaline solution
Claim 12 or in claim 16 processed device of statement.
[claim18]
18. The aforementioned alkaline solution is the alkaline electrolytic water
In claim 17 processed device of statement.
[claim19]
19. At least on the one hand, the cation, or the anion of the aforementioned processed component, or the aforementioned work piece supplying one side at least, it has the electrification processing section which controls the electrification quantity
Claim 12 or in claim 18 processed device of statement.
[claim20]
20. N [2] supplying the gas to the contact region of the aforementioned processed component and the aforementioned work piece, N which controls the electrification quantity [2] it has the gas supply section
Claim 12 or in claim 19 process method of statement.
[claim21]
21. -metal oxide with constitute do process component and,
Making the specified work piece contact with the aforementioned processed component, the retention mechanism which you keep and,
The aforementioned processed component and the ozone gas supply section which supplies the ozone gas to the contact region of the aforementioned work piece and,
The aforementioned processed component and when the aforementioned work piece is made to contact, the drive section which makes the aforementioned processed component displace having,
The aforementioned processed component alumina ceramics or SiO [the inside either of the glass which designates 2] as the main component consists of one,
The aforementioned work piece consists of GaN
Processed device.
[claim22]
22. The aforementioned ozone gas contains the alkaline electrolytic water
In claim 21 processed device of statement.
[claim23]
23. At least on the one hand, the cation, or the anion of the work piece which is processed with the processed component, or the same processed component supplying one side at least, as it controls the electrification quantity, it has the process which it makes displace relatively the aforementioned processed component and when it makes the aforementioned work piece contact
Process method.
[claim24]
24. The aforementioned processed component, or the aforementioned work piece on the one hand, the anion is supplied at least
In claim 23 process method of statement.
[claim25]
25. The aforementioned processed component, or the aforementioned work piece on the one hand, the cation is supplied at least
In claim 23 process method of statement.
[claim26]
26. At least on the one hand, the cation and the anion of the aforementioned processed component, or the aforementioned work piece are supplied
In claim 23 process method of statement.
[claim27]
27. The aforementioned processed component, or the aforementioned work piece one side it humidifies at least
Claim 23 or in claim 26 process method of statement.
[claim28]
28. At least one side of the aforementioned processed component, or the aforementioned suffering processed component it is the insulator
Claim 23 or in claim 27 process method of statement.
[claim29]
29. Irradiating ultraviolet light or the plasma to the surface of aforementioned processed ones, purification and parent it hydrates processes the surface of the same processed component
Claim 23 or in claim 28 process method of statement.
[claim30]
30. N [2] the gas is supplied to the contact region of the aforementioned processed component and the aforementioned work piece
Claim 23 or in claim 29 process method of statement.
[claim31]
31. The aforementioned processed component the metal, inorganic oxide, the inside either of the ceramics consists of one,
The aforementioned work piece the monocrystal diamond, the polycrystal diamonds and the CVD diamond, the inside either of the DLC membranes consists of one
Claim 23 or in claim 30 process method of statement.
[claim32]
32. Processed component and,
At least on the one hand, the cation, or the anion of the work piece which is processed with the said processed component, or the same processed component supplying one side at least, the electrification processing section which controls the electrification quantity and,
The retention mechanism which keeps the specified work piece and,
The aforementioned processed component and when the aforementioned work piece is made to contact, it has with the aforementioned processed component and the drive section which makes the aforementioned work piece displace relatively
Processed device.
[claim33]
33. The aforementioned processed component, or the aforementioned work piece it has the humidification processing section which humidifies
In claim 32 processed device of statement.
[claim34]
34. Purification and the parent hydration processing section which parent it hydrates processes the surface of the aforementioned processed component are had
Claim 32 or in claim 33 processed device of statement.
[claim35]
35. N [2] N which supplies the gas [2] it has the gas supply section for the contact region of the aforementioned processed component and the aforementioned work piece
Claim 32 or in claim 34 processed device of statement.
[claim36]
36. N [2] supplying the gas to the contact region of the work piece which is processed with the processed component and the said processed component, as it controls the electrification quantity, it has the process which it makes displace relatively the aforementioned processed component and when it makes the aforementioned work piece contact
Process method.
[claim37]
37. The aforementioned processed component, or the aforementioned work piece one side it humidifies at least
In claim 36 process method of statement.
[claim38]
38. Processed component and,
N [2] supplying the gas to the contact region of the work piece which is processed with the said processed component and the same processed component, N which controls the electrification quantity [2] the gas supply section and,
The retention mechanism which keeps the specified work piece and,
The aforementioned processed component and when the aforementioned work piece is made to contact, it has with the aforementioned processed component and the drive section which makes the aforementioned work piece displace relatively
Processed device.
[claim39]
39. The aforementioned processed component, or the aforementioned work piece it has the humidification processing section which humidifies
In claim 38 processed device of statement.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KUMAMOTO UNIVERSITY
  • 発明者(英語)
  • KUBOTA AKIHISA
国際特許分類(IPC)
指定国 (WO2017141918)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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