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Manufacturing method of electrode structure with nanogap length, electrode structure with nanogap length and nano-device obtained through manufacturing method NEW

外国特許コード F170009229
整理番号 AF12-08CN2
掲載日 2017年9月14日
出願国 中華人民共和国
出願番号 201610573266
公報番号 106206685
出願日 平成24年2月28日(2012.2.28)
公報発行日 平成28年12月7日(2016.12.7)
国際出願番号 JP2012055002
国際公開番号 WO2012121067
国際出願日 平成24年2月28日(2012.2.28)
国際公開日 平成24年9月13日(2012.9.13)
優先権データ
  • 特願2011-050894 (2011.3.8) JP
  • 2012CN-80012185 (2012.2.28) CN
発明の名称 (英語) Manufacturing method of electrode structure with nanogap length, electrode structure with nanogap length and nano-device obtained through manufacturing method NEW
発明の概要(英語) (CN106206685)
A substrate (1) on which metal layers (2A and 2B) are arranged in pairs at an interval is immersed into an electroless plating solution, wherein the electroless plating solution is prepared by mixing a reducing agent and an interfacial agent into an electrolyte containing metal ions; the metal ions are reduced through the reducing agent; metal is separated out of the metal layers (2A and 2B) and the interfacial agent is attached to the surface of the metal to form an electrode (4A and 4B) pair of controlling the gap length into the nanoscale.
Therefore, a manufacturing method of an electrode structure which can control a gap length deviation and has a nanogap length is provided.
Furthermore, the electrode structure with the nanogap length capable of inhibiting the gap length deviation and a nano-device with the electrode structure are provided by employing the manufacturing method.
特許請求の範囲(英語) [claim1]
1. A nano-device, characterized in, including:
The nano-gaps are arranged so as to have one of the electrode and the other one of the electrodes; the one electrode and another electrode which is disposed between the metal nanoparticles; and the one electrode and another electrode of the at least one set of the monomolecular film.
[claim2]
2. A nano-device according to claim 1, characterized in: a monomolecular film is a self-assembled monolayer.
[claim3]
3. A nano-device according to claim 1, characterized in: a monomolecular film on the metal nanoparticles are chemically attracted.
[claim4]
4. A nano-device according to claim 1, characterized in: the metal nanoparticles by a protecting group consisting of a single molecule monolayer to an alkylthiol of a defective part of chemical bonding, metal nanoparticles and the other electrode with the insulating one electrode.
[claim5]
5. A nano-device according to claim 1, characterized in: one electrode and another electrode on the same surface, the side gate electrode is 1 or more is arranged on the surface.
[claim6]
6. A nano-device according to claim 1, characterized in: further comprising a passivation film.
[claim7]
7. A nano-device, characterized in, including:
The nano-gaps are arranged so as to have one of the electrode and the other one of the electrodes;
The one electrode and another electrode which is disposed between the metal nanoparticles; and
Between the one electrode is interposed between the metal nanoparticles, metal nanoparticles and the other electrode of the single-molecule film,
Metal nano-particles are adsorbed to the through electrode and the other one of the thiol one of the at least one of the electrodes.
[claim8]
8. A nano-device according to claim 7, characterized in: a monomolecular film containing an alkyl thiol.
[claim9]
9. A nano-device according to claim 7, characterized in: a monomolecular film is a self-assembled monolayer.
[claim10]
10. A nano-device according to claim 7, characterized in: as the metal of the nanoparticles of the protecting group through which the cutout portion of the monomolecular film with a single molecule of the alkyl thiol the chemical bonding, metal nano-particles and the one electrode, the other electrode of the at least one insulation.
[claim11]
11. A nano-device according to claim 7, characterized in: one electrode and another electrode on the same surface, the side gate electrode is 1 or more is arranged on the surface.
[claim12]
12. A nano-device according to claim 7, characterized in: further comprising a passivation film.
  • 出願人(英語)
  • JAPAN SCIENCE AND TECHNOLOGY AGENCY
  • 発明者(英語)
  • MAJIMA YUTAKA
  • TERANISHI TOSHIHARU
  • MURAKI TARO
  • TANAKA DAISUKE
国際特許分類(IPC)
参考情報 (研究プロジェクト等) CREST Establishment of Innovative Manufacturing Technology Based on Nanoscience AREA
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