TOP > クイック検索 > 外国特許検索 > SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE

SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE NEW

外国特許コード F170009238
整理番号 (S2016-0476-N0)
掲載日 2017年9月21日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2016JP088196
国際公開番号 WO 2017149912
国際出願日 平成28年12月21日(2016.12.21)
国際公開日 平成29年9月8日(2017.9.8)
優先権データ
  • 特願2016-040061 (2016.3.2) JP
発明の名称 (英語) SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE NEW
発明の概要(英語) A shape measurement method to which the present invention is applied is provided with: a step for irradiating an object to be measured with a light pulse stream in which a plurality of light pulses having a prescribed frequency distribution with respect to a time axis are disposed in a consecutive sequence in time series; and a step for measuring the optical shape of the object to be measured using the correspondence relationship between the sequence numbers of the light pulses of a plurality of light pulse streams to be received after the emitted light pulses are applied to the object to be measured, and using the correspondence relationship between the frequency distributions in the light pulses.
特許請求の範囲(英語) [claim1]
1. The optical pulse which possesses the specified frequency distribution for the time base in the time series the process which irradiates the optical pulse string which in numerical sequence plural is allotted to the suffering measurement object and,
The process which measures the optical form of the aforementioned suffering measurement object after the aforementioned optical pulse which radiation is done operated the aforementioned suffering measurement object due to with the corresponding relationship of the aforementioned number of the aforementioned optical pulse in the plural light absorbent object optical pulse strings and the corresponding relationship of the aforementioned frequency distribution inside the aforementioned optical pulse and,
The form measuring method which it has.
[claim2]
2. As for the aforementioned optical pulse string in the claim 1 which can by controlling the phase of discrete mode frequency of light COM form measuring method of statement.
[claim3]
3. As for corresponding relationship of the aforementioned number of the aforementioned optical pulse in the aforementioned plural light absorbent object optical pulse strings, the claim 1 which can making use of the interference signal which occurs due to the fact that the aforementioned light absorbent object optical pulse string and inside the propagation space which possesses specified optical path the reference beam pulse string which is spread interfere or in claim 2 form measuring method of statement.
[claim4]
4. The optical pulse which possesses the specified frequency distribution for the time base in the time series the illuminant which irradiates the optical pulse string which in numerical sequence plural is allotted to the suffering measurement object and,
The optical form test section which measures the optical form of the aforementioned suffering measurement object after the aforementioned optical pulse which radiation is done operated the aforementioned suffering measurement object due to with the corresponding relationship of the aforementioned number of the aforementioned optical pulse in the plural light absorbent object optical pulse strings and the corresponding relationship of the aforementioned frequency distribution inside the aforementioned optical pulse from the aforementioned illuminant and,
The form measurement equipment which it has.
[claim5]
5. As for the aforementioned illuminant, due to the fact that phase of discrete mode frequency is controlled the aforementioned optical pulse string in the claim 4 which has radiation possible light COM the form measurement equipment of statement.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • THE UNIVERSITY OF ELECTRO-COMMUNICATIONS
  • 発明者(英語)
  • MINOSHIMA KAORU
国際特許分類(IPC)
指定国 (WO2017149912)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
ライセンスをご希望の方、特許の内容に興味を持たれた方は、下記までご連絡ください

PAGE TOP

close
close
close
close
close
close