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SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE

Foreign code F170009238
File No. (S2016-0476-N0)
Posted date Sep 21, 2017
Country WIPO
International application number 2016JP088196
International publication number WO 2017149912
Date of international filing Dec 21, 2016
Date of international publication Sep 8, 2017
Priority data
  • P2016-040061 (Mar 2, 2016) JP
Title SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE
Abstract A shape measurement method to which the present invention is applied is provided with: a step for irradiating an object to be measured with a light pulse stream in which a plurality of light pulses having a prescribed frequency distribution with respect to a time axis are disposed in a consecutive sequence in time series; and a step for measuring the optical shape of the object to be measured using the correspondence relationship between the sequence numbers of the light pulses of a plurality of light pulse streams to be received after the emitted light pulses are applied to the object to be measured, and using the correspondence relationship between the frequency distributions in the light pulses.
Scope of claims [claim1]
1. The optical pulse which possesses the specified frequency distribution for the time base in the time series the process which irradiates the optical pulse string which in numerical sequence plural is allotted to the suffering measurement object and,
The process which measures the optical form of the aforementioned suffering measurement object after the aforementioned optical pulse which radiation is done operated the aforementioned suffering measurement object due to with the corresponding relationship of the aforementioned number of the aforementioned optical pulse in the plural light absorbent object optical pulse strings and the corresponding relationship of the aforementioned frequency distribution inside the aforementioned optical pulse and,
The form measuring method which it has.
[claim2]
2. As for the aforementioned optical pulse string in the claim 1 which can by controlling the phase of discrete mode frequency of light COM form measuring method of statement.
[claim3]
3. As for corresponding relationship of the aforementioned number of the aforementioned optical pulse in the aforementioned plural light absorbent object optical pulse strings, the claim 1 which can making use of the interference signal which occurs due to the fact that the aforementioned light absorbent object optical pulse string and inside the propagation space which possesses specified optical path the reference beam pulse string which is spread interfere or in claim 2 form measuring method of statement.
[claim4]
4. The optical pulse which possesses the specified frequency distribution for the time base in the time series the illuminant which irradiates the optical pulse string which in numerical sequence plural is allotted to the suffering measurement object and,
The optical form test section which measures the optical form of the aforementioned suffering measurement object after the aforementioned optical pulse which radiation is done operated the aforementioned suffering measurement object due to with the corresponding relationship of the aforementioned number of the aforementioned optical pulse in the plural light absorbent object optical pulse strings and the corresponding relationship of the aforementioned frequency distribution inside the aforementioned optical pulse from the aforementioned illuminant and,
The form measurement equipment which it has.
[claim5]
5. As for the aforementioned illuminant, due to the fact that phase of discrete mode frequency is controlled the aforementioned optical pulse string in the claim 4 which has radiation possible light COM the form measurement equipment of statement.
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • THE UNIVERSITY OF ELECTRO-COMMUNICATIONS
  • Inventor
  • MINOSHIMA KAORU
IPC(International Patent Classification)
Specified countries (WO2017149912)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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