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PHASE-DIFFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE NEW

外国特許コード F170009264
整理番号 (S2016-0479-N0)
掲載日 2017年10月24日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP012647
国際公開番号 WO 2017170554
国際出願日 平成29年3月28日(2017.3.28)
国際公開日 平成29年10月5日(2017.10.5)
優先権データ
  • 特願2016-068958 (2016.3.30) JP
発明の名称 (英語) PHASE-DIFFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE NEW
発明の概要(英語) [Problem] To provide a phase-difference scanning transmission electron microscope that has excellent operatability and that is capable of imaging the phase change of a sample with desired contrast while minimizing the electron beam exposure of the sample. [Solution] This phase-difference scanning transmission electron microscope is provided with: an electron gun 31; an irradiation optical system 32; a scan coil 33; a convergence optical system 34; an objective lens 35; and a bright field detector 36 that detects the intensity of an electron beam. A Fresnel zone plate 40 is arranged on the upstream side of a STEM focal plane such that the focus thereof is set on the STEM focal plane. Thus, electron beams including a reference wave and a main probe wave from the plate irradiate a sample object 50 placed between the convergence optical system 34 and the objective lens 35.
特許請求の範囲(英語) [claim1]
1. Electron gun and,
The focus optical system which focuses the electronic beam which is emitted from the aforementioned electron gun and,
In order the electronic beam from the aforementioned focus optical system to scan in horizontal direction vis-a-vis the sample, scanning expedient in order to deflect and,
The object glass which irradiates the electronic beam which is deflected with the aforementioned scanning expedient to the aforementioned sample and,
In the scan transmission electron microscope device which has with the expedient which detects the strength of the electronic beam which transmitted the aforementioned sample,
The phase difference scan transmission electron microscope device which features that it is the electron wave which has the focus position where, the object glass front focal plane between the aforementioned electron gun and the aforementioned object glass it is arranged in the position where it differs, has bimusupuritsuta which is converted to the main probe wave and the reference wave of the ratio which the electronic beam which is emitted from the aforementioned electron gun beforehand is set, as for the aforementioned main probe wave and the reference wave differs.
[claim2]
2. As for ratio of the aforementioned main probe wave and the aforementioned reference wave which are converted in the scan transmission electron microscope device which is stated in the aforementioned claim 1, by aforementioned bimusupuritsuta the phase difference scan transmission electron microscope device which features that it is the 4 or less of 0.25 or more.
[claim3]
3. In the scan transmission electron microscope device which is stated in the aforementioned claim 2, as for aforementioned bimusupuritsuta, the phase difference scan transmission electron microscope device which features that the Fresnel zone plate is included.
[claim4]
4. At the same time, as for the particular Fresnel zone plate, in order the description above ties the focus of the reference wave which is focused the position where the aforementioned makes pass on the other hand and makes the aforementioned main probe wave, focuses another side, Fresnel zone plate the amount wave does the aforementioned electronic beam at least in two beams in the scan transmission electron microscope device which is stated in the aforementioned claim 3, or, emits, as the aforementioned reference wave, or, the reference wave which is emitted the position where the focus is tied with lens system, to match the focus of the aforementioned electron gun side of the aforementioned object glass, being arranged featureThat the phase difference scan transmission electron microscope device which is done.
[claim5]
5. In the scan transmission electron microscope device which is stated in the aforementioned claim 4, as for the aforementioned Fresnel zone plate, in order the amount wave to do the whole of the aforementioned electronic beam, the phase difference scan transmission electron microscope device which features that it is arranged.
[claim6]
6. In the scan transmission electron microscope device which is stated in the aforementioned claim 4, as for the aforementioned Fresnel zone plate, in order the amount wave to do portion of the aforementioned electronic beam, the phase difference scan transmission electron microscope device which features that it is arranged.
[claim7]
7. Between the aforementioned Fresnel zone plate and the aforementioned object glass, the lens of one or more is provided in the scan transmission electron microscope device which is stated in the aforementioned claim 4, in order the particular lens, the focus position where the aforementioned Fresnel zone plate ties, to match the focus of the aforementioned electron gun side of the aforementioned object glass, the phase difference scan transmission electron microscope device which features that it arranges in the position where it moves or transfers and.
[claim8]
8. In the scan transmission electron microscope device which is stated in the aforementioned claim 4, the phase difference scan transmission electron microscope device which features that it arranges in the position where it agrees with the convergent point of the aforementioned reference wave and the focus of the aforementioned electron gun side of the aforementioned object glass with the fact that the aforementioned Fresnel zone plate, furthermore, the description above provides one which makes the reference wave focus which is emitted lens at least in aforementioned main burobu wave which is passed and aforementioned reference wave which is made to emit with the function which the amount wave is done, has, the particular lens.
[claim9]
9. In the scan transmission electron microscope device which is stated in the aforementioned claim 3, as for the aforementioned Fresnel zone plate, nitriding silicon, the phase difference scan transmission electron microscope device which features that the concentric circular condition which designates the tungsten, the platinum, the gold, the silver, the copper, the lead, the iron, zinc, tin, the molybdenum, titanium, the nickel or the aluminum, or those alloys which absorb the electronic beam into amorphous carbon or on the thin film which designates gurahuen as the material, as the material is constituted at least from the zonal 1 or more.
[claim10]
10. The phase difference scan transmission electron microscope device which features that it is the thin film where the concentric circular condition where the aforementioned Fresnel zone plate, designates the tungsten, the platinum, the gold, the silver, the copper, the lead, the iron, zinc, tin, the molybdenum, titanium, the nickel or the aluminum, or those alloys which absorb the electronic beam as the material in the scan transmission electron microscope device which is stated in the aforementioned claim 3, has the building a bridge section is formed at least from the zonal 1 or more.
[claim11]
11. In the scan transmission electron microscope device which is stated in the aforementioned claim 3, as for the aforementioned Fresnel zone plate, nitriding silicon, in amorphous carbon or on the thin film which designates gurahuen as the material, the phase difference scan transmission electron microscope device which features that the concentric circular condition which shifts the phase of the electronic beam is constituted at least from the groove of the zonal condition 1 or more.
[claim12]
12. The phase difference scan transmission electron microscope device which features that it is the constitution where the aforementioned Fresnel zone plate, furthermore, nitriding silicon, in amorphous carbon or on the thin film which designates gurahuen as the material, pastes the absorption type Fresnel zone plate where the concentric circular condition which shifts the phase of the electronic beam is formed at least from the groove of the zonal condition 1 or more in the scan transmission electron microscope device which is stated in the aforementioned claim 9, adjusts.
[claim13]
13. In the scan transmission electron microscope device which is stated in the aforementioned claim 11, as for the aforementioned Fresnel zone plate, furthermore, on that, nitriding silicon, in amorphous carbon or on the thin film which designates gurahuen as the material, the phase difference scan transmission electron microscope device which features that it constitutes by forming at least the zonal 1 or more of the concentric circular condition which designates the tungsten, the platinum, the gold, the silver, the copper, the lead, the iron, zinc, tin, the molybdenum, titanium, the nickel or the aluminum, or those alloys which absorb the electronic beam as the material.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES
  • 発明者(英語)
  • NAGATANI YUKINORI
国際特許分類(IPC)
指定国 (WO2017170554)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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