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PHASE CONTRAST TRANSMISSION ELECTRON MICROSCOPE DEVICE NEW

外国特許コード F170009265
整理番号 (S2016-0480-N0)
掲載日 2017年10月24日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2017JP012654
国際公開番号 WO 2017170558
国際出願日 平成29年3月28日(2017.3.28)
国際公開日 平成29年10月5日(2017.10.5)
優先権データ
  • 特願2016-069638 (2016.3.30) JP
発明の名称 (英語) PHASE CONTRAST TRANSMISSION ELECTRON MICROSCOPE DEVICE NEW
発明の概要(英語) [Problem] To provide a phase contrast transmission electron microscope equipped with a long-life phase modulating means which does not absorb the electron beam and is not affected by the irradiation of the electron beam, and in which it is possible to vary the phase modulation amount of the electron beam. [Solution] An electron microscope 10 is equipped with: an electron gun; a first laser irradiation process which is provided between the electron beam source and an objective lens and irradiates the electron beam emitted from the electron beam source with a laser; a second laser irradiation process which is provided upon the focal plane behind the objective lens and converges a laser upon the focal point of the electron beam passing through a sample while irradiating the beam with the laser; and a screen or two-dimensional electron beam sensor which detects a sample image as the intensity distribution of the electron beam by means of an image forming optical system.
特許請求の範囲(英語) [claim1]
1. The electron source which emits the electronic beam and,
Object glass and,
The sample retention stand in order is arranged between the aforementioned electronic radiation source and the aforementioned object glass, to keep the sample and,
The image formation optical system which is arranged in the rear of the aforementioned object glass and,
Being the transmission electron microscope device which has with the expedient in order to detect the sample image by the aforementioned image formation optical system, as intensity distribution of the electronic beam,
In on the focal plane of back of the aforementioned object glass, in the aforementioned electronic beam, the phase difference transmission electron microscope device which features that the 1st laser optical lighting expedient which irradiates the laser light which possesses the direction of the electric field which is parallel with the traveling direction is had.
[claim2]
2. The electronic beam which is emitted from the aforementioned electronic radiation source in the phase difference transmission electron microscope device which is stated in the aforementioned claim 1, furthermore, in interval the aforementioned electronic radiation source and the aforementioned object glass the phase difference transmission electron microscope device which features that the 2nd laser optical lighting expedient which has the 1st light condensing lens which condenses, irradiates the laser in on the focal plane of the particular 1st light condensing lens is had.
[claim3]
3. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 2, laser light from the aforementioned 2nd laser optical lighting expedient, the phase difference transmission electron microscope device which features that it is the laser light which possesses the direction of the electric field which is parallel with the traveling direction of the aforementioned electronic beam.
[claim4]
4. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 3, as for laser light from the aforementioned 1st laser optical lighting expedient and laser light from the aforementioned 2nd laser optical lighting expedient, the phase difference transmission electron microscope device which features that it is the laser light which occurs from the identical laser oscillator.
[claim5]
5. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 4, as for the aforementioned identical laser oscillator, the phase difference transmission electron microscope device which features that it is the laser oscillator of single mode.
[claim6]
6. Before transmitting the aforementioned sample on downstream side of lighting of the laser light with the aforementioned 2nd laser optical lighting expedient in the phase difference transmission electron microscope device which is stated in the aforementioned claim 4, the phase difference transmission electron microscope device which features that the 3rd laser optical lighting expedient which irradiates the laser to the focus of the aforementioned electronic beam is had.
[claim7]
7. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 6, laser light from the aforementioned 3rd laser optical lighting expedient, the phase difference transmission electron microscope device which features that it is the laser light which possesses the direction of the electric field which is parallel with the traveling direction of the aforementioned electronic beam.
[claim8]
8. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 7, as for laser light from the aforementioned 1st laser optical lighting expedient and laser light from the aforementioned 2nd laser optical lighting expedient and laser light from the aforementioned 3rd laser optical lighting expedient, the phase difference transmission electron microscope device which features that it is the laser light which occurs from the identical laser oscillator.
[claim9]
9. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 8, as for the aforementioned identical laser oscillator, the phase difference transmission electron microscope device which features that it is the laser oscillator of single mode.
[claim10]
10. In the phase difference transmission electron microscope device which is stated in the aforementioned claim 1, as for detection expedient of the aforementioned sample image, the phase difference transmission electron microscope device which features that the screen or 2 dimensional electronic beam sensor are included.
[claim11]
11. The phase difference transmission electron microscope device which features that it detects phase change, amplitude change, or bijibiritei by the aforementioned sample by changing the parameter of the aforementioned lighting laser in the phase difference transmission electron microscope device which is stated in the aforementioned claim 1, acquire the plural pictures, as the picture.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES
  • 発明者(英語)
  • NAGATANI YUKINORI
国際特許分類(IPC)
指定国 (WO2017170558)
National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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