PROBLEM TO BE SOLVED: To provide the evaluation system of a threshold current density with a numeric value simulation method carried out by a computer system.
SOLUTION: A current density distribution and temperature distribution of wiring are first obtained in 2-dimensional FEM analysis (S204). Atomic flux divergences AFD*li of each factor are found, by utilizing the results of the FEM analysis and thin film characteristic coefficient (205) (S206). The atomic concentration N is found, by calculating the decreased amounts or increased amounts of atoms in each factor in time increments allocated by actual time (S208). For the change of the atomic concentration N, the factor of an end is calculated, based on the value of Jend+AFD*li|strxΔl, and other factors are calculated, based on the value of AFD*li (S206). The atomic concentrations N in each factor are calculated, based on the distributions of the N's, the gradients of the atomic concentrations are calculated. As shown in the flowchart of the figure, these calculations are executed repeatedly (S210).