PROBLEM TO BE SOLVED: To provide a new Auger photoelectron coincidence spectroscope and an Auger photoelectron coincidence spectroscopy wherein the Auger photoelectron coincidence can be detected easily and at a low cost with a high efficiency.
SOLUTION: A coaxial symmetrical mirror electron energy analyzer is prepared and a miniature cylinder mirror electron analyzer is arranged concentrically in this coaxial symmetrical mirror electron energy analyzer. Photoelectrons from a prescribed test piece are detected by this coaxial symmetrical electron energy analyzer, and Auger electrons from the test piece are detected by the miniature cylinder mirror electron analyzer. Then, a multi-channel scaler is prepared and a signal of the photoelectrons is introduced into the trigger side of the multi-channel scaler, and the signal of the Auger electrons is introduced into the input side of the multi-channel scaler. Then, the Auger electron signal is triggered by the photoelectron signal, thereby detecting the obtained Auger photoelectron coincidence signal.