PROBLEM TO BE SOLVED: To make vacuum ultraviolet rays and deep ultraviolet rays propagate in optical fiber probe at high transmission rate, to reduce the fiber deterioration caused by the irradiation of ultraviolet rays, and to form a desired acute part on the tip part of the optical fibers by etching.
SOLUTION: An optical fiber probe 1 is provided with an acute part 3 obtained by making the tip part of an optical fiber 2 acute using an etchant and the outer circumferential face of the acute part 3 is provided with a metallic film 4 for shielding light. The optical fiber 2 is provided with a core 5, a clad 6a on the outer circumference of the core 5, a protective layer 7 and a protective film layer 8 regularly in this order. The core 5 is formed of silica glass having a fluorine content of 100 to 1,000 ppm. The clad 6a is formed of silica glass having a fluorine content of 1,000 to 7,000 ppm, or a silica glass having a boron content of 2,000 to 10,000 ppm.