PROBLEM TO BE SOLVED: To pick up the image of the positional distribution of various kinds of elements existing on the surface of a substance and a thin film accurately and quickly for analysis by providing an angle dispersion-limiting means at the substance and the limiter for limiting the angle dispersion of fluorescent X rays and bringing the detector and the limiting means closest to the substance.
SOLUTION: A collimator plate 1 of an angle dispersion means and a camera 2 are installed immediately above the closest distance of a sample 3 and the rear proximity position of the plate 1, respectively. Monochromatic radiation light X rays of a synchrotron radiation light source are used as an X-ray source 4. After X rays pass through a slit 5 and a double crystal monochrometer 6, a light path width in a horizontal direction is limited by a slit 7, X rays pass through an incidence intensity detector 8 and are totally reflected on the surface of the sample 3 at a small angle, the angle dispersion of fluorescent X rays being generated near the surface of the sample 3 is limited by the plate 1 and an image is picked up by the camera 2. At this time, since the plate 1 is the fine tube assembly of glass, the angle dispersion of small fluorescent X rays is limited. An image is picked up quickly for analysis by this kind of X-ray image pick-up analysis device.