PROBLEM TO BE SOLVED: To effectively produce a perovskite phase at a low temperature by dissolving Zr and Ti alkoxides and lead acetate together with a stabilizing agent to obtain a colloidal solution, adding a fullerene, gelling the mixture and baking the gel at low temperature after drying.
SOLUTION: A ceramic precursor comprising Zr and Ti alkoxides and lead acetate, etc., is dissolved together with a stabilizing agent in an organic solvent such as alcohol and a colloidal solution (sol) of an oxide ceramic is produced from the above solution by using a proper amount of water. A fullerene such as 60C fullerene is added to the solution and the mixture is gelatinized, dried and baked at low temperature. A perovskite phase can be effectively produced at a low temperature by this process. Accordingly, problems such as deviation of composition caused by the diffusion of the substrate metal into the PZT film, peeling of the PZT film caused by high thermal stress and the deterioration of other element and joint part of electrode integrated on a substrate are effectively prevented.