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SPECTRAL ANALYSIS DEVICE AND SPECTRAL ANALYSIS METHOD NEW

外国特許コード F200010068
整理番号 6011
掲載日 2020年5月15日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2018JP038601
国際公開番号 WO 2019097939
国際出願日 平成30年10月17日(2018.10.17)
国際公開日 令和元年5月23日(2019.5.23)
優先権データ
  • 特願2017-222322 (2017.11.17) JP
発明の名称 (英語) SPECTRAL ANALYSIS DEVICE AND SPECTRAL ANALYSIS METHOD NEW
発明の概要(英語) Provided is a spectral analysis device capable of obtaining in-plane and out-of-plane thin-film absorbance spectrums even if the angle of incidence of light irradiated from a light source onto a support body is fixed. This spectral analysis device comprises a light source 1, support body 2, linear polarization filter 3, detection unit 4, regression computation unit 5, and absorbance spectrum calculation unit 6. The support body 2 is fixed so as to produce a prescribed angle of incidence θ. The linear polarization filter 3 is constituted so that light having a polarization angle φn from 0° to 90° is irradiated onto the support body 2. The detection unit 4 detects a transmission spectrum S from transmitted light having the polarization angle φn. The regression computation unit 5 uses the transmission spectrum S and a mixing ratio R to obtain in-plane and out-of-plane spectrums Sip, Sop through regression analysis. The absorbance spectrum calculation unit 6 calculates in-plane and out-of-plane thin-film absorbance spectrums Aip, Aop on the basis of the in-plane and out-of-plane spectrums obtained in a state in which a thin film is supported by the support body 2 and a state in which the thin film is not supported by the support body.
従来技術、競合技術の概要(英語) BACKGROUND ART
The functional organic material such as polyimide is known as a porphyrin, sexiphenyl, sekushichieniru, of the thin film of polytetrafluoroethylene or the like, molecules are aligned in a specific direction and orientation, or to improve the function of the new function or expression has been known. Therefore, various techniques for controlling molecular orientation have been developed. Such an orientation control is important, in the techniques for analyzing the molecular orientation of the thin film. The functional organic material has been subjected to alignment processing by analyzing the molecular orientation, the plane of the atoms in the vicinity of the surface of the thin film structure can be accurately grasped, the functional material is important in research and biotechnology.
Such as the molecular orientation in the method of analysis, Fourier transform infrared spectroscopy and soft X-ray absorption spectroscopy, ultraviolet photoelectron spectroscopy and the like are known. In addition, a more accurate analysis is possible, in combination with the infrared spectroscopy of the thin film of high refractive index on the support medium such as a high-accuracy analysis can be made incident on the polygonal resolved spectroscopy (MAIRS method) has also been known (Patent Document 1, Non-Patent Document 1). This is because, in the absorption spectroscopy measurement of the spectrum of the thin film, thin film 2 and the transition moment parallel to the perpendicular to the two independent spectrum in order to obtain a technique. Here, the transition moment is parallel and perpendicular to the thin film, in the case of infrared spectroscopy, parallel and perpendicular to the vibration of the thin film may be in other words a functional group. Resolved spectroscopy is incident on the polygon, a plurality of thin film non-polarized light and an incident angle, by analyzing the transmission spectrum, and the extraordinary (the traveling direction of light electric field perpendicular to the light having the vibration) and the virtual light (light traveling direction of light having a vibration electric field) is converted into absorbance spectra of each of the present invention. Comparing the spectrum of one such well 2, the degree to which each functional group of the alignment can be easily analyzed.
Further, the support having a low refractive index cannot be used in the method MAIRS solve the problem as, support s-polarized light component of the light emitted from the polarizing filter is used to shield the p-polarized light component which are also known methods for measuring pMAIRS (Patent Document 2). PMAIRS method, the support at different angles of incidence of the p polarized light intensity of the transmitted light acquired by irradiating light from the spectrum, the spectrum and out-of-plane plane by regression calculation in the spectrum.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • KYOTO UNIVERSITY
  • 発明者(英語)
  • HASEGAWA, Takeshi
  • SHIOYA, Nobutaka
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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