TOP > 外国特許検索 > ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUPPRESSING ION BEAM SPREAD

ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUPPRESSING ION BEAM SPREAD NEW

外国特許コード F200010107
整理番号 2595
掲載日 2020年5月18日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2010JP057405
国際公開番号 WO 2010143479
国際出願日 平成22年4月27日(2010.4.27)
国際公開日 平成22年12月16日(2010.12.16)
優先権データ
  • 特願2009-158255 (2009.6.11) JP
発明の名称 (英語) ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUPPRESSING ION BEAM SPREAD NEW
発明の概要(英語) Provided is an ion beam irradiation apparatus wherein electron use efficiency is improved and ion beam spread due to space-charge effects is efficiently suppressed by effectively using the space in the vicinity of a magnet, while not requiring a special magnetic pole structure. The ion beam irradiation apparatus is provided with an ion source (2), a collimating magnet (6), and a plurality of electron sources (11). The electron sources (11) are disposed at positions, which are in a magnetic gradient region (K) formed in the upstream or downstream of the ion beam in the collimating magnet (6) and are outside of the passing region of the ion beam (IB). The electron irradiation direction is so set as to supply electrons to the magnetic field gradient region (K).
従来技術、競合技術の概要(英語) BACKGROUND ART
Conventionally, this type of ion beam irradiation apparatus includes, as shown in Patent Document 1, an ion source generating an ion beam, the ions from the ion source beam is deflected by the deflection magnet, the deflection of the magnet pole constituting the electron source and provided on the inner surface, the opposing magnetic pole from the electron source by electron beams, the space charge effect to suppress the divergence of the ion beam (which is also referred to as neutralized.) And is being considered.
However, the magnetic pole within the magnetic field the emitted electron to travel along, any of the electron source is provided to the opposing magnetic pole and the magnetic poles to disappear and the collision. For this reason, in order to suppress the divergence of the ion beam utilization efficiency of electrons is poor. In addition, Patent Document 1 in Fig. 6 or the like, between the electron source and the magnetic poles of an insulator or a conductor may be provided across the ion beam by the reflected electrons is described, which is unknown and being reflected, the divergence of the ion beam space charge effect can be suppressed is not clear whether or not.
In addition, the electron source to embed the inner surface of the magnetic pole, the magnetic pole inside the recessed portion is provided and a special processing is required (Patent Document 1 like in Fig. 5), this only complicated the structure of the pole plane is not, processing is also a problem that the cost is increased. Incidentally, as described above, by providing the insulator or a conductor leading to an increase in processing cost is also a problem.
Further, the magnetic pole inside a recess or the like and the complicated shape of the insulator or by providing the conductive body, a uniform magnetic field formed by the magnetic pole is difficult, the ion beam deflected in a desired direction can be changed with high accuracy is difficult.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NISSIN ION EQUIPMENT CO.,LTD.
  • KYOTO UNIVERSITY
  • 発明者(英語)
  • NICOLAESCU, Dan
  • SAKAI, Shigeki
  • ISHIKAWA, Junzo
  • GOTOH, Yasuhito
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BR BW BY BZ CA CH CL CN CO CR CU CZ DE DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IS JP KE KG KM KN KP KR KZ LA LC LK LR LS LT LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PE PG PH PL PT RO RS RU SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ MD RU TJ TM
EPO: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG
ライセンスをご希望の方、特許の内容に興味を持たれた方は、下記までご連絡ください。

PAGE TOP

close
close
close
close
close
close