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SURFACE SHAPE MEASUREMENT DEVICE AND SURFACE SHAPE MEASUREMENT METHOD

外国特許コード F200010169
整理番号 (S2018-0962-N0)
掲載日 2020年6月3日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2019JP033990
国際公開番号 WO 2020045589
国際出願日 令和元年8月29日(2019.8.29)
国際公開日 令和2年3月5日(2020.3.5)
優先権データ
  • 特願2018-160900 (2018.8.29) JP
発明の名称 (英語) SURFACE SHAPE MEASUREMENT DEVICE AND SURFACE SHAPE MEASUREMENT METHOD
発明の概要(英語) The present invention provides a surface shape measurement device and a surface shape measurement method, which do not require a physical reference plane and can improve measurement accuracy without using a mechanical adjustment mechanism. An illumination light condensing point PQ and a reference light condensing point PL are arranged as mirror images of each other with respect to a virtual plane VP, and each datum of object light O that is the reflected light of spherical wave illumination light Q and in-line spherical wave reference light L is recorded in a hologram. In the virtual plane VP, a reproduction object light hologram hV for measurement is generated, and a spherical wave light hologram sV representing spherical wave light emitted from the reference light condensing point PL is analytically generated. From the phase distribution obtained by dividing the reproduction object light hologram hV by the spherical wave light hologram sV, the height distribution of the object 4 on the surface to be measured is obtained. The phase data of the reflected light from the surface to be measured is acquired, and is compared with the phase distribution of the spherical wave obtained analytically on the plane cut surface, so that a highly accurate surface shape measurement is realized without requiring a reference plane such as a glass substrate.
従来技術、競合技術の概要(英語) BACKGROUND ART
Conventionally, such as reflected light or transmitted light to techniques for analyzing light, the intensity of the light and the phase of the data is also referred to as a recording medium such as a photographic plate in the hologram recorded in the holography analysis. Is holographic in recent years, a light receiving element using a semiconductor memory, and the intensity of light acquired as a digital data phase, or a computer generated hologram, the analysis is performed. In this way is the holography, referred to as digital holography.
In the digital holography, the hologram data acquisition and processing of high speed and high accuracy in order to achieve a variety of techniques have been proposed, which imaging applications. For example, the one-shot the hologram recorded at the spatial frequency filtering and the spatial heterodyne modulation data and is applied, the complex amplitude of the in-line hologram for reproducing the object image at a high speed and accurately generating digital holography has been known (for example, see Patent Document 1).
In order to solve the problem of the conventional optical microscope, by using holography, the imaging lens without using a large numerical aperture of the object light of a method of recording the one-shot, and the recorded plane wave object beam expanded by the computer 3 high-resolution three-dimensional image accurately reproducing the known method (for example, see Patent Document 2). According to this method, a distortion-free high-resolution three-dimensional moving image can be recorded or reproduced 3 utilizes three-dimensional microscope lens 3 are realized. In such a microscope, because imaging lens is not used, with a conventional optical microscope, the lens and the imaging medium under the influence of the problem can be solved.
In addition, the internal structure of the biological tissue and cells in culture in order to measure a high resolution, and a wavelength swept laser light reflection type microscope lens-less holographic high-resolution tomographic imaging method is used has been known (for example, see Patent Document 3).
Further, different incident direction of illumination light emitted from an object is irradiated with a large numerical aperture of the object light, the incident direction of illuminating light is recorded as the hologram data for each, of these plurality of large numerical aperture combined with a single hologram of the hologram, greater than 1 based on the number of the synthetic aperture method of reproducing the object light has been known (for example, see Patent Document 4). According to this method, typically having a resolution that exceeds the diffraction limit of the ultra-high resolution three-dimensional microscope 3 can be realized.
In addition, the accuracy of the optical recording and optical recording by one-shot digital holography of the plane wave expansion device used has been known (for example, see Patent Document 5). According to the ellipsometry device, including non-parallel angle of incidence of the illumination light by the incident light having a large number of reflected light can be recorded in the hologram data at once, a number corresponding to the frequency of the incident angle for each vector Ψ angle ellipsometry, Δ can be obtained, the measurement efficiency can be improved.
In addition, the image pickup element, one of the image forming lens 2, cube type beam splitter, and an element having a reference plane a Fizeau arranged in series to the measurement object, measured from the reference plane and the interference fringes of the reflected light and a shape measurement interference measuring apparatus has been known (for example, see Patent Document 6).
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • UNIVERSITY OF HYOGO
  • 発明者(英語)
  • SATO KUNIHIRO
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG

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