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MAGNETIZED PLASMOID INJECTION DEVICE NEW

外国特許コード F200010192
整理番号 (S2018-1047-N0)
掲載日 2020年7月29日
出願国 世界知的所有権機関(WIPO)
国際出願番号 2019JP042585
国際公開番号 WO 2020090890
国際出願日 令和元年10月30日(2019.10.30)
国際公開日 令和2年5月7日(2020.5.7)
優先権データ
  • 特願2018-207684 (2018.11.2) JP
発明の名称 (英語) MAGNETIZED PLASMOID INJECTION DEVICE NEW
発明の概要(英語) A magnetized plasmoid injection device (10) which enables the precise control of the amount of impurities, and which is provided with: a cylindrical external electrode (11); an internal electrode (12) which is coaxially arranged within the external electrode; a plasma generating gas supply unit (13) which supplies a plasma generating gas in a pulse state between the external electrode and the internal electrode; a magnetic field generation unit (15) which applies a magnetic field that generates a magnetized plasmoid between the external electrode and the internal electrode; a power supply control unit (14) which applies a discharge voltage between the external electrode and the internal electrode; and an impurity generation unit (100) which has the magnetized plasmoid contain impurities. The impurity generation unit comprises: a cover electrode (102) which opens to the external electrode; a needle-like electrode (101) which is positioned within the cover electrode, while being composed of impurities; and an impurity generating power supply which applies a voltage to the cover electrode and the needle-like electrode.
従来技術、競合技術の概要(英語) BACKGROUND ART
Spheroplasts mac plasma generated by a, the magnetization is known a coaxial plasma generating device. Coaxial plasma generating device includes a magnetization, is arranged coaxially between the external electrode and the internal electrode by applying a voltage, between the two electrodes to cause discharge in the plasma is generated in. In this case, the bias magnetic field is applied to the plasma, with the magnetic field caused by the discharge current, the bias magnetic field including the released state, and the spheroplasts mac plasma. Here, the spheroplasts mac plasma, the current flowing in the toroidal and poloidal by itself both confinement magnetic field is generated, the magnetic helicity of a magnetic field having a structure to store in a self-coordination.
Such a device, to facilitate the magnetization of the plasmoid about several tens to several hundreds of km per second can be injected, the magnetization of the magnetic field confinement as the high-speed injection plasmoid purazumahe fuel particle is used as a feed to the child. As an example of such a device, the present inventors have found applications such as shown in Patent Document 1 are performed.
In addition, the high-speed injection device is plasmoid magnetization, during the plasma generation by the current of the electrode has the effect of sputtering. Injection device includes a high speed the magnetization of the plasmoid, and to enhance the effects in the sputtering, the impurities such as metal film is formed by mixing and injecting can be performed. As an example of such a device, the inventors of the present invention, a high melting point metal or alloy thin film comprising the alloy thin film can be generated at low cost with respect to the generating device, shown in Patent Document 2 and Patent Document 3 such as carrying out the application.
  • 出願人(英語)
  • ※2012年7月以前掲載分については米国以外のすべての指定国
  • NIHON UNIVERSITY
  • 発明者(英語)
  • ASAI Tomohiko
  • KOBAYASHI Daichi
  • SEKI Taichi
国際特許分類(IPC)
指定国 National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL SM ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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