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CORPUSCULAR BEAM IMAGE DETECTOR USING GAS AMPLIFICATION BY PIXEL TYPE ELECTRODES

Foreign code F040001020
File No. (A051P176)
Posted date Apr 25, 2005
Country WIPO
International application number 2001JP005165
International publication number WO 2002/001249
Date of international filing Jun 18, 2001
Date of international publication Jan 3, 2002
Priority data
  • P2000-191994 (Jun 27, 2000) JP
Title CORPUSCULAR BEAM IMAGE DETECTOR USING GAS AMPLIFICATION BY PIXEL TYPE ELECTRODES
Abstract A corpuscular beam image detector which has a high sensitivity and which uses the gas amplification by pixel type electrodes capable of improving the reliability of an electrode portion. Electrons e-, as ionized in a gas by an incoming corpuscular beam, are drifted by a drift electric field to the pixels of a cylindrical anode electrode (12) in a detector surface direction. In the vicinity of the cylindrical anode electrode (12), the electrons are caused to effect a gas avalanche amplification by the intensive electric field which is established by the anode-cathode voltage and the speck-like electrode shape. The resultant + ions quickly drift to a surrounding strip-shaped cathode electrode (14). In this procedure, there are generated at both the cylindrical anode electrode (12) and the strip-shaped cathode electrode (14) the charges which can be observed on an electric circuit, so that the incoming corpuscular beam can be located by observing which strip of the anode and the cathode that amplification phenomenon has occurred at.
Scope of claims (In Japanese)
【請求項1】【請求の範囲】1.(a)両面基板の裏面に形成される陽極ストリップと、(b)該陽極ストリップに植設されるとともに、その上端面が前記両面基板の表面に露出する円柱状陽極電極と、(C)該円柱状陽極電極の上端面の回りに穴が形成されるストリップ状陰極電極とを具備することを特徴とするピクセル型電極によるガス増幅を用いた粒子線画像検出器。

【請求項2】2.請求項1記載のピクセル型電極によるガス増幅を用いた粒子線画像検出器において、前記陽極ストリップは約200μm~400μmの幅を有することを特徴とするピクセル型電極によるガス増幅を用いた粒子線画像検出器。

【請求項3】3.請求項1記載のピクセル型電極によるガス増幅を用いた粒子線画像検出器において、前記陽極ストリップが約400μm間隔で配置され、前記ストリップ状陰極電極には、一定間隔で直径約200~300μmの穴が形成され、前記円柱状陽極電極は直径約40~60μm、高さ約50μm~150μmの形状であることを特徴とするピクセル型電極によるガス増幅を用いた粒子線画像検出器。
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • Japan Science And Technology Corporation
  • Inventor
  • Tanimori,Toru
  • Ochi,Atsuhiko
IPC(International Patent Classification)
Reference ( R and D project ) CREST Single Molecule and Atom Level Reactions AREA
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