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SPECTROMETRY DEVICE

Foreign code F200010237
File No. (S2019-0116-N0)
Posted date Oct 29, 2020
Country WIPO
International application number 2020JP008480
International publication number WO2020175694
Date of international filing Feb 28, 2020
Date of international publication Sep 3, 2020
Priority data
  • P2019-036989 (Feb 28, 2019) JP
Title SPECTROMETRY DEVICE
Abstract This spectrometry device 200 comprises: a fixed reflection member 21 that has a fixed reflection surface 21a; a movable reflection member 22 that has a movable reflection surface 22a and that is disposed in parallel to and side-by-side with the fixed reflection surface 21a; a drive mechanism 23 that drives the movable reflection member 21 to reciprocate in the normal direction of the fixed reflection surface 21a; a guiding optical system that guides measurement light emitted from a measurement object so that such light extends across the fixed reflection surface 21a and the movable reflection surface 22a; an image forming optical system that causes light resulting from the measurement light guided to the fixed reflection surface 21a being reflected by the fixed reflection surface 21a and light resulting from the measurement light guided to the movable reflection surface 22a being reflected by the movable reflection surface 22a to respectively condense on an image forming surface; a photodetector 40 that detects the intensity of the light which has condensed on the image forming surface; through holes 22c, 22d that are formed in the movable reflection member 22 in parallel to the reflection surface 22a; and indicators 21d, 21e that are formed on the fixed reflection member 21 and that are provided at positions so as to be visible from the through holes 22c, 22d.
Outline of related art and contending technology Background Art
One technique for measuring spectral characteristics is referred to as imaging type 2 dimensional Fourier spectroscopy). In this method, non-directional light (emitted from the sample surface (object surface) is converted into parallel luminous flux by an objective lens, And a phase shifter composed of a fixed mirror part and a movable mirror part arranged in parallel with each other and side by side, and the measuring light (reflected by both mirror parts is condensed at the same point on an imaging surface by an imaging lens. The movable mirror part is moved to impart an optical path length difference between the measurement light reflected by the fixed mirror part and the measurement light reflected by the movable mirror part, so that the measurement light condensed on the imaging surface interferes with each other to form interference light of the measurement light. Detecting the intensity of this interfering light at each element of a 2 dimensional array device, such as a 0 0 0 camera, disposed on the imaging plane; A set indicating the intensity change of the interference light according to the optical path length difference is obtained, and a spectral characteristic (spectrum) of the measurement light is obtained by mathematically Fourier transforming the set.
Scope of claims (In Japanese)[請求項1]
 a) 固定反射面を有する固定反射部材と、
 b) 前記固定反射面と平行に且つ横並びに配置された可動反射面を有する可動反射部材と、
 c) 前記可動反射部材を、前記固定反射面の法線方向に往復移動させる駆動機構と、
 d) 測定対象物から発せられた測定光を前記固定反射面と前記可動反射面に跨るように導く導入光学系と、
 e) 前記固定反射面に導入された前記測定光が該固定反射面によって反射された光と、前記可動反射面に導入された前記測定光が該可動反射面によって反射された光をそれぞれ結像面上に集光させる結像光学系と、
 f) 前記結像面上に集光した光の強度を検出する光検出器と、
 g) 前記可動反射部材および前記固定反射部材のいずれか一方に形成された、反射面に平行な貫通孔と、他方に形成された、前記貫通孔から覗くことができる位置に設けられた指標と
 を備える、分光測定装置。

[請求項2]
 請求項1に記載の分光測定装置において、
 前記指標が、罫線又は十字状のマークから構成されている、分光測定装置。

[請求項3]
 請求項1に記載の分光測定装置において、
 前記指標が、前記貫通孔と断面形状が同じである孔から構成されている、分光測定装置。

[請求項4]
 請求項3に記載の分光測定装置において、さらに、
 前記貫通孔と前記孔が横並びの状態にあるときにのみ該貫通孔から前記孔にかけて挿通可能な軸部材を備える、分光測定装置。

[請求項5]
 前記貫通孔が、2個以上の断面円形状の貫通孔から構成されており、
 前記孔が、2個以上の断面円形状の孔から構成されている、請求項3又は4に記載の分光測定装置。

[請求項6]
 請求項1~5のいずれかに記載の分光測定装置において、さらに、
 ベースプレートを備え、
 前記ベースプレートの上面に、前記固定反射面が該上面と垂直になるように前記固定反射部材が固定され、前記固定反射部材の上面に前記駆動機構が固定されている、分光測定装置。

[請求項7]
 前記駆動機構が、前記固定反射面の法線方向に往復移動する移動体を備え、前記可動反射部材が、前記移動体に着脱可能に取り付けられている、請求項1~6のいずれかに記載の分光測定装置。

[請求項8]
 前記固定反射部材および前記可動反射部材が、それぞれ金属ブロックから成り、該金属ブロックを鏡面加工することにより反射面が形成されたものである、請求項1~7のいずれかに記載の分光測定装置。
  • Applicant
  • ※All designated countries except for US in the data before July 2012
  • KAGAWA UNIVERSITY
  • Inventor
  • ISHIMARU, Ichiro
IPC(International Patent Classification)
Specified countries National States: AE AG AL AM AO AT AU AZ BA BB BG BH BN BR BW BY BZ CA CH CL CN CO CR CU CZ DE DJ DK DM DO DZ EC EE EG ES FI GB GD GE GH GM GT HN HR HU ID IL IN IR IS JO JP KE KG KH KN KP KR KW KZ LA LC LK LR LS LU LY MA MD ME MG MK MN MW MX MY MZ NA NG NI NO NZ OM PA PE PG PH PL PT QA RO RS RU RW SA SC SD SE SG SK SL ST SV SY TH TJ TM TN TR TT TZ UA UG US UZ VC VN WS ZA ZM ZW
ARIPO: BW GH GM KE LR LS MW MZ NA RW SD SL SZ TZ UG ZM ZW
EAPO: AM AZ BY KG KZ RU TJ TM
EPO: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
OAPI: BF BJ CF CG CI CM GA GN GQ GW KM ML MR NE SN ST TD TG
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